Problem amtetcher 2001-09-05 19:40:10: trns power is not stable

qwang at snf.stanford.edu qwang at snf.stanford.edu
Wed Sep 5 07:40:13 PDT 2001


the TRNS power ranged from 1160 to 1180 W.
There were some arcing during etching process.
the window is not clear.




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