From hphan at snf.stanford.edu Tue Aug 6 11:27:36 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Aug 6, 2002 11:27:36 AM Subject: Shutdown amtetcher 2002-08-06 11:27:35: Error Message Message-ID: After I enable the system, I open the bell jar and I could close it down. From cbaxter at snf.stanford.edu Wed Aug 7 07:30:57 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 7, 2002 7:30:57 PM Subject: Shutdown amtetcher 2002-08-07 08:57:11: Acring Hex #4 Message-ID: cleaned up arc marks and change ardel that burn was badly burned. ran 20mins seasoning recipe#3 From booth at snf.stanford.edu Mon Aug 12 08:06:52 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 12, 2002 8:06:52 AM Subject: Shutdown amtetcher 2002-08-12 08:06:51: Tray #3 arced at latch Message-ID: From cbaxter at snf.stanford.edu Mon Aug 12 04:49:09 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 12, 2002 4:49:09 PM Subject: Shutdown amtetcher 2002-08-12 08:06:51: Tray #3 arced at latch Message-ID: cleaned arc mark on tray and installed. pump is down for mins and ran recipe#3 for 20mins From sams at snf.stanford.edu Tue Aug 13 11:57:11 2002 From: sams at snf.stanford.edu (sams at snf.stanford.edu) Date: Aug 13, 2002 11:57:11 AM Subject: Shutdown amtetcher 2002-08-13 11:57:11: arching on tray 1 Message-ID: At the end of my process I saw evidence of arching on tray 1 at the latch. From hphan at snf.stanford.edu Tue Aug 13 01:53:00 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Aug 13, 2002 1:53:00 PM Subject: Problem amtetcher 2002-08-13 13:52:59: Tray #3 is Arcing as well Message-ID: From cbaxter at snf.stanford.edu Tue Aug 13 05:49:55 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 13, 2002 5:49:55 PM Subject: Shutdown amtetcher 2002-08-13 11:57:11: arching on tray 1 Message-ID: tray 1 is not arcing its tray 3 From cbaxter at snf.stanford.edu Tue Aug 13 05:51:55 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 13, 2002 5:51:55 PM Subject: Problem amtetcher 2002-08-13 13:52:59: Tray #3 is Arcing as well Message-ID: removed trya and top plate. cleaned arc mark. changed latch screws on tray 1,2,3 and 4. installed new ardel shield From jdas at snf.stanford.edu Wed Aug 14 03:50:42 2002 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: Aug 14, 2002 3:50:42 PM Subject: Problem amtetcher 2002-08-14 15:50:41: Found loose vacuum wand, tried to tigten it, but it broke Message-ID: From cbaxter at snf.stanford.edu Wed Aug 14 09:03:04 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 14, 2002 9:03:04 PM Subject: Problem amtetcher 2002-08-14 15:50:41: Found loose vacuum wand, tried to tigten it, but it broke Message-ID: installed new vacuum wand From hphan at snf.stanford.edu Thu Aug 15 12:31:33 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Aug 15, 2002 12:31:33 PM Subject: Shutdown amtetcher 2002-08-15 12:31:32: Arcing on tray#1 & 4 Message-ID: From cbaxter at snf.stanford.edu Thu Aug 15 06:37:27 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 15, 2002 6:37:27 PM Subject: Shutdown amtetcher 2002-08-15 12:31:32: Arcing on tray#1 & 4 Message-ID: cleaned arc mark on tray1 and 4. changed ardel shield on tray#1. checked all trays to make sure is there all tight. ran condition recipe From booth at snf.stanford.edu Mon Aug 26 07:04:35 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 26, 2002 7:04:35 AM Subject: Shutdown amtetcher 2002-08-26 07:04:34: tray # 4 arced at latch area Message-ID: also, 12 out of the total of 24 dummy wafers were loaded into the trays with the major flat located under a wafer retaining clip, so the wafers were not held tightly against the hexode pedestals. This may have contributed to the arcing. From latta at snf.stanford.edu Mon Aug 26 05:12:28 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Aug 26, 2002 5:12:28 PM Subject: Shutdown amtetcher 2002-08-26 07:04:34: tray # 4 arced at latch area Message-ID: Arc'ed spots cleaned and repaired. After 30 min seasoning, looks good. From yyao at snf.stanford.edu Thu Aug 29 08:58:50 2002 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Aug 29, 2002 8:58:50 AM Subject: Problem amtetcher 2002-08-29 08:58:49: low cool water level Message-ID: From booth at snf.stanford.edu Thu Aug 29 09:27:58 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 29, 2002 9:27:58 AM Subject: Problem amtetcher 2002-08-29 08:58:49: low cool water level Message-ID: topped up cold resevoir with DI water. Found machine in service, equip ON mode ??? Restarted system, looks OK. From yyao at snf.stanford.edu Thu Aug 29 10:27:38 2002 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Aug 29, 2002 10:27:38 AM Subject: Problem amtetcher 2002-08-29 10:27:37: turbo went off Message-ID: From yyao at snf.stanford.edu Thu Aug 29 10:28:12 2002 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Aug 29, 2002 10:28:12 AM Subject: Shutdown amtetcher 2002-08-29 10:28:10: turbo went off Message-ID: From hphan at snf.stanford.edu Thu Aug 29 12:36:08 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Aug 29, 2002 12:36:08 PM Subject: Shutdown amtetcher 2002-08-29 10:28:10: Re-start system Message-ID: From hphan at snf.stanford.edu Thu Aug 29 12:36:52 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Aug 29, 2002 12:36:52 PM Subject: Problem amtetcher 2002-08-29 10:27:37: Re-start system Message-ID: From huac at snf.stanford.edu Fri Aug 30 03:49:28 2002 From: huac at snf.stanford.edu (huac at snf.stanford.edu) Date: Aug 30, 2002 3:49:28 AM Subject: Problem amtetcher 2002-08-30 03:49:27: Arcing Message-ID: One of the electrode appears going to have Arcing, Please be cautious when you run. I don't shut down the equipment because I don't see the serious dark arcing color yet. From hphan at snf.stanford.edu Fri Aug 30 09:08:15 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Aug 30, 2002 9:08:15 AM Subject: Problem amtetcher 2002-08-30 03:49:27: Check all trays, Looks fine Message-ID: