Shutdown amtetcher 2002-08-26 07:04:34: tray # 4 arced at latch area

booth at snf.stanford.edu booth at snf.stanford.edu
Mon Aug 26 07:04:35 PDT 2002


also, 12 out of the total of 24 dummy wafers
were loaded into the trays with the major 
flat located under a wafer retaining clip,
so the wafers were not held tightly against
the hexode pedestals.  This may have 
contributed to the arcing.




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