Shutdown amtetcher 2002-12-05 09:54:41: Observed Arc mark on 6th &5th pannel latch.

jdas at snf.stanford.edu jdas at snf.stanford.edu
Thu Dec 5 09:54:42 PST 2002


Obseved arc marks under 5th and 6th pannel latch after
venting the tool during initial inspection prior to loading any wafers.




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