Shutdown amtetcher 2002-12-16 06:59:15: turbo pump is off.

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Mon Dec 16 05:09:02 PST 2002


reseated cpu pcb and power up. ramp turbo and enter recipe#3 and 2. ran 5 mins recipe to test plasma.




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