From latta at snf.stanford.edu Mon Feb 4 03:01:21 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Feb 4, 2002 3:01:21 PM Subject: Shutdown amtetcher 2002-02-04 15:01:20: Turbo turned off Message-ID: Water error? From cbaxter at snf.stanford.edu Mon Feb 4 09:45:37 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 4, 2002 9:45:37 PM Subject: Shutdown amtetcher 2002-02-04 15:01:20: Turbo turned off Message-ID: reset system and regen cryo From mbadi at snf.stanford.edu Thu Feb 7 02:34:36 2002 From: mbadi at snf.stanford.edu (mbadi at snf.stanford.edu) Date: Feb 7, 2002 2:34:36 AM Subject: Problem amtetcher 2002-02-07 02:34:34: program goes into "holding" mode before beginning of etch Message-ID: I was running program 24 (via etch) and each time i started an etch run the program would go into "holding" mode and the alarm would go off before it would say "opening final." in order to get out of "holding" and onto "opening final" i had to hit the "run" button. i did a series of five etches and this happened every time. From cbaxter at snf.stanford.edu Thu Feb 7 05:21:06 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 7, 2002 5:21:06 PM Subject: Problem amtetcher 2002-02-07 02:34:34: program goes into "holding" mode before beginning of etch Message-ID: reset tool From ychliu at snf.stanford.edu Sat Feb 9 03:57:14 2002 From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu) Date: Feb 9, 2002 3:57:14 PM Subject: Problem amtetcher 2002-02-09 15:57:12: Small black spot found on top of tray #3 Message-ID: Not sure whether it is a arcing spot. From bchui at snf.stanford.edu Sat Feb 9 06:30:29 2002 From: bchui at snf.stanford.edu (bchui at snf.stanford.edu) Date: Feb 9, 2002 6:30:29 PM Subject: Problem amtetcher 2002-02-09 18:30:28: Pressure out of limit error (pgm#4) Message-ID: pressure out of limit error during seasoning run of pgrm #4 From jdas at snf.stanford.edu Mon Feb 11 11:09:09 2002 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: Feb 11, 2002 11:09:09 AM Subject: Problem amtetcher 2002-02-11 11:09:08: All pannels look clean, but occational arcing Message-ID: Hi, all pannels looked clean before loading but occational arcing was observed during process. process aborted. Pannels still look clean. From hphan at snf.stanford.edu Mon Feb 11 11:36:28 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Feb 11, 2002 11:36:28 AM Subject: Problem amtetcher 2002-02-11 11:09:08: That is not Arcing, It's just flashing during process Message-ID: From cbaxter at snf.stanford.edu Mon Feb 11 04:00:00 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 11, 2002 4:00:00 PM Subject: Problem amtetcher 2002-02-09 18:30:28: Pressure out of limit error (pgm#4) Message-ID: resumed without a problem From cbaxter at snf.stanford.edu Mon Feb 11 04:56:06 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 11, 2002 4:56:06 PM Subject: Problem amtetcher 2002-02-09 15:57:12: Small black spot found on top of tray #3 Message-ID: no arcing found on any trays From yyao at snf.stanford.edu Mon Feb 11 10:21:42 2002 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Feb 11, 2002 10:21:42 PM Subject: Problem amtetcher 2002-02-11 22:21:40: burned spot on hexode 3 Message-ID: From cbaxter at snf.stanford.edu Mon Feb 11 11:05:35 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 11, 2002 11:05:35 PM Subject: Problem amtetcher 2002-02-11 22:21:40: burned spot on hexode 3 Message-ID: cleaned arcing on tray latch From booth at snf.stanford.edu Tue Feb 19 07:36:50 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 19, 2002 7:36:50 AM Subject: Shutdown amtetcher 2002-02-19 07:36:49: tray #6 has black arc at latch Message-ID: CORAL indicates that user yangxu was the last user. yangxu did not report this. From cbaxter at snf.stanford.edu Tue Feb 19 06:11:25 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 19, 2002 6:11:25 PM Subject: Shutdown amtetcher 2002-02-19 07:36:49: tray #6 has black arc at latch Message-ID: cleaned up arc mark.. From hphan at snf.stanford.edu Thu Feb 21 10:08:48 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Feb 21, 2002 10:08:48 AM Subject: Problem amtetcher 2002-02-21 10:08:47: Gas Flow Out of Limite Message-ID: Process #1 (NF3) gas flow out of setting. Setting is 25 and it only flow 20. When I press the "Process Select" to process 4 & 5, screen show (Not Ready, Cryo pump is off) From cbaxter at snf.stanford.edu Thu Feb 21 06:59:16 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Feb 21, 2002 6:59:16 PM Subject: Problem amtetcher 2002-02-21 10:08:47: Gas Flow Out of Limite Message-ID: opened process valve on gas banker for nf3 From jdas at snf.stanford.edu Mon Feb 25 02:08:57 2002 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: Feb 25, 2002 2:08:57 PM Subject: Shutdown amtetcher 2002-02-25 14:08:54: Arcing on pannel 3,seen before process Message-ID: Pannel 3 had arcking marks near the top clamp. Obsered durig initial inspection From mdickey at snf.stanford.edu Wed Feb 27 10:20:33 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Feb 27, 2002 10:20:33 AM Subject: Shutdown amtetcher 2002-02-27 10:20:31: arcing trays Message-ID: I am putting the etcher down to clean up the arced tray and hexode cap From mdickey at snf.stanford.edu Wed Feb 27 11:00:53 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Feb 27, 2002 11:00:53 AM Subject: Shutdown amtetcher 2002-02-25 14:08:54: Arcing on pannel 3,seen before process Message-ID: cleaned up arcing tray and hexode From mdickey at snf.stanford.edu Wed Feb 27 11:01:12 2002 From: mdickey at snf.stanford.edu (mdickey at snf.stanford.edu) Date: Feb 27, 2002 11:01:12 AM Subject: Shutdown amtetcher 2002-02-27 10:20:31: arcing trays Message-ID: cleaned up all arcing and adjusted the trays From booth at snf.stanford.edu Thu Feb 28 07:47:20 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 28, 2002 7:47:20 AM Subject: Shutdown amtetcher 2002-02-28 07:47:19: Maintenance Message-ID: pump maintenance. From booth at snf.stanford.edu Thu Feb 28 11:12:57 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Feb 28, 2002 11:12:57 AM Subject: Shutdown amtetcher 2002-02-28 07:47:19: Maintenance Message-ID: Added fomblin 14/6 to vane pump. Topped up heat exchanger with DI. Adjusted all 6 tray latches.