Problem amtetcher 2002-02-11 11:09:08: All pannels look clean, but occational arcing

jdas at snf.stanford.edu jdas at snf.stanford.edu
Mon Feb 11 11:09:09 PST 2002


Hi, all pannels looked clean before loading but occational arcing was observed during process. process aborted. Pannels still look clean.




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