Problem amtetcher 2002-02-21 10:08:47: Gas Flow Out of Limite

hphan at snf.stanford.edu hphan at snf.stanford.edu
Thu Feb 21 10:08:48 PST 2002


Process #1 (NF3) gas flow out of setting. Setting is 25 and it 
only flow 20.
When I press the "Process Select" to process 4 & 5, screen 
show (Not Ready, Cryo pump is off)




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