From cbaxter at snf.stanford.edu Wed Jan 2 09:01:21 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 2, 2002 9:01:21 PM Subject: Shutdown amtetcher 2001-12-19 08:03:19: Annual Maintenance Message-ID: tool is ready to use.. From yyao at snf.stanford.edu Fri Jan 4 11:52:13 2002 From: yyao at snf.stanford.edu (yyao at snf.stanford.edu) Date: Jan 4, 2002 11:52:13 AM Subject: Problem amtetcher 2002-01-04 11:52:13: Turbo has to pump twice to reach vacuum Message-ID: From booth at snf.stanford.edu Fri Jan 4 12:45:12 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 4, 2002 12:45:12 PM Subject: Problem amtetcher 2002-01-04 11:52:13: Turbo has to pump twice to reach vacuum Message-ID: Bell jar was not open for too long, so this may need to be watched. From gyama at snf.stanford.edu Tue Jan 8 11:46:47 2002 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Jan 8, 2002 11:46:47 AM Subject: Comment amtetcher 2002-01-08 11:46:46: vac wand tip broken Message-ID: From gyama at snf.stanford.edu Tue Jan 8 11:50:03 2002 From: gyama at snf.stanford.edu (gyama at snf.stanford.edu) Date: Jan 8, 2002 11:50:03 AM Subject: Comment amtetcher 2002-01-08 11:50:02: vac wand tip broken Message-ID: From hphan at snf.stanford.edu Wed Jan 9 09:29:01 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Jan 9, 2002 9:29:01 AM Subject: Shutdown amtetcher 2002-01-09 09:29:00: Arcing on Tray #3 Message-ID: From cbaxter at snf.stanford.edu Wed Jan 9 09:24:17 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 9, 2002 9:24:17 PM Subject: Shutdown amtetcher 2002-01-09 09:29:00: Arcing on Tray #3 Message-ID: removed tray#3 and cleaned arc mark on tray. changed ardel shield. ran o2 clean. From erics at snf.stanford.edu Thu Jan 10 05:09:53 2002 From: erics at snf.stanford.edu (erics at snf.stanford.edu) Date: Jan 10, 2002 5:09:53 PM Subject: Problem amtetcher 2002-01-10 17:09:52: amt etcher Message-ID: i have noticed slight but continuous arcing along all tray edges during my etch process and also with amt ass. silicon wafers. bias voltage was low -506V and len has been notified by voicemail. all silicon wafers seem to have residue on their backsidesand also alittle bit of this residue has stuck onto the electrodes eric From cbaxter at snf.stanford.edu Thu Jan 10 09:53:41 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 10, 2002 9:53:41 PM Subject: Problem amtetcher 2002-01-10 17:09:52: amt etcher Message-ID: removed trays and wipe down hex and trays with ipa. From grupp at snf.stanford.edu Sun Jan 13 09:26:14 2002 From: grupp at snf.stanford.edu (grupp at snf.stanford.edu) Date: Jan 13, 2002 9:26:14 PM Subject: Problem amtetcher 2002-01-13 21:26:13: "NOT READY" on display Message-ID: From grupp at snf.stanford.edu Sun Jan 13 09:32:55 2002 From: grupp at snf.stanford.edu (grupp at snf.stanford.edu) Date: Jan 13, 2002 9:32:55 PM Subject: Problem amtetcher 2002-01-13 21:32:54: Low base plate temp? Message-ID: From booth at snf.stanford.edu Mon Jan 14 06:59:32 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 14, 2002 6:59:32 AM Subject: Problem amtetcher 2002-01-13 21:32:54: Low base plate temp? Message-ID: From booth at snf.stanford.edu Mon Jan 14 06:59:35 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 14, 2002 6:59:35 AM Subject: Problem amtetcher 2002-01-13 21:26:13: "NOT READY" on display Message-ID: From latta at snf.stanford.edu Mon Jan 14 12:24:45 2002 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Jan 14, 2002 12:24:45 PM Subject: Problem amtetcher 2002-01-14 12:24:44: Unusual whineing sound Message-ID: Almost like a sick turbo pump.... From booth at snf.stanford.edu Mon Jan 14 01:51:46 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 14, 2002 1:51:46 PM Subject: Problem amtetcher 2002-01-14 12:24:44: Unusual whineing sound Message-ID: From rohits at snf.stanford.edu Tue Jan 15 09:50:40 2002 From: rohits at snf.stanford.edu (rohits at snf.stanford.edu) Date: Jan 15, 2002 9:50:40 AM Subject: Shutdown amtetcher 2002-01-15 09:50:39: hexode rotation/positioning error Message-ID: When the hexode is jogged, it does not find the correct position to stop. It gives an alarm, saying "Hex did not rotate" This happens for rotation in either direction. From cbaxter at snf.stanford.edu Wed Jan 16 07:37:43 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Jan 16, 2002 7:37:43 PM Subject: Shutdown amtetcher 2002-01-15 09:50:39: hexode rotation/positioning error Message-ID: Len, rebuild hex electrode. From narya at snf.stanford.edu Sun Jan 20 06:36:41 2002 From: narya at snf.stanford.edu (narya at snf.stanford.edu) Date: Jan 20, 2002 6:36:41 PM Subject: Problem amtetcher 2002-01-20 18:36:39: turbo pumpdown slow.. Message-ID: I had 24 wafers loaded and was running Std Oxide Etch. The machine would take a lot of time to pumpdown to the required base pressure (0.2) From booth at snf.stanford.edu Tue Jan 22 07:21:59 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 22, 2002 7:21:59 AM Subject: Problem amtetcher 2002-01-20 18:36:39: turbo pumpdown slow.. Message-ID: This seems to be normal, since the cryopump is not being used. From evelyn at snf.stanford.edu Mon Jan 28 10:46:56 2002 From: evelyn at snf.stanford.edu (evelyn at snf.stanford.edu) Date: Jan 28, 2002 10:46:56 AM Subject: Problem amtetcher 2002-01-28 10:46:55: wand is over bent Message-ID: hard to lift wafers from holder due to over bent wand From hphan at snf.stanford.edu Mon Jan 28 02:34:16 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Jan 28, 2002 2:34:16 PM Subject: Problem amtetcher 2002-01-28 10:46:55: Fixed The wand Message-ID: From sanli at snf.stanford.edu Wed Jan 30 11:11:02 2002 From: sanli at snf.stanford.edu (sanli at snf.stanford.edu) Date: Jan 30, 2002 11:11:02 AM Subject: Shutdown amtetcher 2002-01-30 11:11:02: turbo went off Message-ID: First it wrote something like no cooling water, and then turbo went off. From booth at snf.stanford.edu Wed Jan 30 11:32:35 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Jan 30, 2002 11:32:35 AM Subject: Shutdown amtetcher 2002-01-30 11:11:02: turbo went off Message-ID: EMCS programming glitch turned off our process cooling water pumps, which shutdown the turbo pump. Restarted it OK.