From jdas at snf.stanford.edu  Mon Jul  1 10:58:05 2002
From: jdas at snf.stanford.edu (jdas at snf.stanford.edu)
Date: Jul 1, 2002 10:58:05 AM
Subject: Problem amtetcher 2002-07-01 10:58:03: hexode homing problem
Message-ID: <mailman.273.1357938217.25670.amtetcher-pcs@snf.stanford.edu>

Took few attempts to bring down the beljar after unloading the
wafers.



From booth at snf.stanford.edu  Mon Jul  1 01:54:47 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jul 1, 2002 1:54:47 PM
Subject: Problem amtetcher 2002-07-01 10:58:03: hexode homing problem
Message-ID: <mailman.274.1357938217.25670.amtetcher-pcs@snf.stanford.edu>

known problem.  does not affect process.



From mislam at snf.stanford.edu  Wed Jul 10 10:32:29 2002
From: mislam at snf.stanford.edu (mislam at snf.stanford.edu)
Date: Jul 10, 2002 10:32:29 AM
Subject: Shutdown amtetcher 2002-07-10 10:32:29: Arcing mark on plate #2
Message-ID: <mailman.275.1357938217.25670.amtetcher-pcs@snf.stanford.edu>

Cheched plated before run, they were ok.



From booth at snf.stanford.edu  Thu Jul 11 01:45:26 2002
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jul 11, 2002 1:45:26 PM
Subject: Shutdown amtetcher 2002-07-10 10:32:29: Arcing mark on plate #2
Message-ID: <mailman.276.1357938217.25670.amtetcher-pcs@snf.stanford.edu>

removed hex top & tray#2, cleaned & replaced
arced ardel, reinstalled, ran process 3 for 30 min,
checked all trays - all OK.