From pindermu at snf.stanford.edu Fri Nov 15 10:12:35 2002 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Nov 15, 2002 10:12:35 PM Subject: Problem amtetcher 2002-11-15 22:12:34: Very difficult to bring the HEX to its home position Message-ID: From pindermu at snf.stanford.edu Sat Nov 16 12:24:08 2002 From: pindermu at snf.stanford.edu (pindermu at snf.stanford.edu) Date: Nov 16, 2002 12:24:08 AM Subject: Problem amtetcher 2002-11-16 00:24:07: Very small traces of arcing on latch 1, wafer 2 and 3 Message-ID: From hphan at snf.stanford.edu Mon Nov 18 09:36:42 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Nov 18, 2002 9:36:42 AM Subject: Shutdown amtetcher 2002-11-18 09:36:41: Arcing on tray#6 Message-ID: From hphan at snf.stanford.edu Mon Nov 18 11:07:01 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Nov 18, 2002 11:07:01 AM Subject: Shutdown amtetcher 2002-11-18 09:36:41: Removed Arcing, ran a seasoning. Message-ID: From hphan at snf.stanford.edu Mon Nov 18 11:07:24 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Nov 18, 2002 11:07:24 AM Subject: Problem amtetcher 2002-11-16 00:24:07: Clear Message-ID: From hphan at snf.stanford.edu Mon Nov 18 11:07:38 2002 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Nov 18, 2002 11:07:38 AM Subject: Problem amtetcher 2002-11-15 22:12:34: Message-ID: From rajesh at snf.stanford.edu Fri Nov 22 12:14:40 2002 From: rajesh at snf.stanford.edu (rajesh at snf.stanford.edu) Date: Nov 22, 2002 12:14:40 PM Subject: Shutdown amtetcher 2002-11-22 12:14:39: RF Gen doesn't turn on. Message-ID: I did a 15 min seasoning, program #5. It was ok then. When I raan it with the device wafers, it wouldn't start RF. From cbaxter at snf.stanford.edu Fri Nov 22 04:12:24 2002 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Nov 22, 2002 4:12:24 PM Subject: Shutdown amtetcher 2002-11-22 12:14:39: RF Gen doesn't turn on. Message-ID: Len and I changed the bad blower. rf tested ok. pls check your recipe before ranning the tool From ericp at snf.stanford.edu Sun Nov 24 10:55:31 2002 From: ericp at snf.stanford.edu (ericp at snf.stanford.edu) Date: Nov 24, 2002 10:55:31 PM Subject: Problem amtetcher 2002-11-24 22:55:30: Crack in delrin Message-ID: The delrin on plate #4, 3rd wafer spot from the top has a small crack extending from the wafer opening to the edge of that section. No signs of arcing. From booth at snf.stanford.edu Mon Nov 25 06:57:59 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Nov 25, 2002 6:57:59 AM Subject: Shutdown amtetcher 2002-11-25 06:57:57: wafer trays need repair Message-ID: From booth at snf.stanford.edu Mon Nov 25 07:51:16 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Nov 25, 2002 7:51:16 AM Subject: Problem amtetcher 2002-11-24 22:55:30: Crack in delrin Message-ID: should have been reported as a shutdown. From booth at snf.stanford.edu Mon Nov 25 07:52:06 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Nov 25, 2002 7:52:06 AM Subject: Shutdown amtetcher 2002-11-25 06:57:57: wafer trays need repair Message-ID: replaced broken tray insulator. adjusted 3 loose tray latches. From booth at snf.stanford.edu Mon Nov 25 07:52:09 2002 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Nov 25, 2002 7:52:09 AM Subject: Shutdown amtetcher 2002-11-25 06:57:57: wafer trays need repair Message-ID: replaced broken tray insulator. adjusted 3 loose tray latches.