Problem amtetcher 2002-11-16 00:24:07: Very small traces of arcing on latch 1, wafer 2 and 3
pindermu at snf.stanford.edu
pindermu at snf.stanford.edu
Sat Nov 16 12:24:08 PST 2002
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Problem amtetcher 2002-11-15 22:12:34: Very difficult to bring the HEX to its home position
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Shutdown amtetcher 2002-11-18 09:36:41: Arcing on tray#6
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Problem amtetcher 2002-11-15 22:12:34: Very difficult to bring the HEX to its home position
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Shutdown amtetcher 2002-11-18 09:36:41: Arcing on tray#6
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