Shutdown amtetcher 2002-11-18 09:36:41: Arcing on tray#6
hphan at snf.stanford.edu
hphan at snf.stanford.edu
Mon Nov 18 09:36:42 PST 2002
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Problem amtetcher 2002-11-16 00:24:07: Very small traces of arcing on latch 1, wafer 2 and 3
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Shutdown amtetcher 2002-11-18 09:36:41: Removed Arcing, ran a seasoning.
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Problem amtetcher 2002-11-16 00:24:07: Very small traces of arcing on latch 1, wafer 2 and 3
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Shutdown amtetcher 2002-11-18 09:36:41: Removed Arcing, ran a seasoning.
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