Shutdown amtetcher 2002-11-22 12:14:39: RF Gen doesn't turn on.

rajesh at snf.stanford.edu rajesh at snf.stanford.edu
Fri Nov 22 12:14:40 PST 2002


I did a 15 min seasoning, program #5. It was ok then. When I raan it with the device wafers, it wouldn't start RF.




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