Problem amtetcher 2002-11-24 22:55:30: Crack in delrin
booth at snf.stanford.edu
booth at snf.stanford.edu
Mon Nov 25 07:51:16 PST 2002
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Problem amtetcher 2002-11-24 22:55:30: Crack in delrin
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Shutdown amtetcher 2002-11-25 06:57:57: wafer trays need repair
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should have been reported as a shutdown.
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Problem amtetcher 2002-11-24 22:55:30: Crack in delrin
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Shutdown amtetcher 2002-11-25 06:57:57: wafer trays need repair
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