Shutdown amtetcher 2002-10-11 09:38:22: broken wafers, pieces in chamber

booth at snf.stanford.edu booth at snf.stanford.edu
Fri Oct 11 09:38:25 PDT 2002


Ali Agah broke several quartz wafers while
loading the wafer trays onto the hex.
Broken pieces of quartz were scattered around
the chamber and into the cryo & turbo pump
ports.




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