Shutdown amtetcher 2002-10-11 09:38:22: broken wafers, pieces in chamber
booth at snf.stanford.edu
booth at snf.stanford.edu
Fri Oct 11 09:39:09 PDT 2002
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Shutdown amtetcher 2002-10-11 09:38:22: broken wafers, pieces in chamber
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Shutdown amtetcher 2002-10-15 13:33:35: tiny arc spot near the top latch
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cleaned up broken quartz wafer pieces.
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Shutdown amtetcher 2002-10-11 09:38:22: broken wafers, pieces in chamber
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Shutdown amtetcher 2002-10-15 13:33:35: tiny arc spot near the top latch
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