Shutdown amtetcher 2002-09-03 13:05:12: Arcing on trays number 1 & 4

pindermu at snf.stanford.edu pindermu at snf.stanford.edu
Tue Sep 3 01:05:13 PDT 2002


There was arcing on tray number 1 and 4.  Checked tray before use, but I didn't notice anything. During the etch, I noticed a flicker in plasma, just once.
I left tray number 1 outside and the bell jar open.
Pierre




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