Shutdown amtetcher 2002-09-03 13:05:12: Arcing on trays number 1 & 4

[pindermu at snf.stanford.edu]

There was arcing on tray number 1 and 4.  Checked tray before use, but I didn't notice anything. During the etch, I noticed a flicker in plasma, just once.
I left tray number 1 outside and the bell jar open.
Pierre