Problem amtetcher 2002-09-22 11:03:52: Plate#1 brownish region on front

mislam at snf.stanford.edu mislam at snf.stanford.edu
Sun Sep 22 11:03:53 PDT 2002


Enabled machine and proceed to check plates.
Found that plate#1 looks brownish  on lower
front of the plate, around second wafer from bottom.
Second wafer also has a brown stain.  Decided
not to use the machine, placed in standby and disabled
in coral.




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