Problem amtetcher 2002-09-22 11:03:52: Plate#1 brownish region on front
booth at snf.stanford.edu
booth at snf.stanford.edu
Mon Sep 23 07:08:10 PDT 2002
Observed partially etched film on wafer,
giving brown color - no damage to
hardware seen.
More information about the amtetcher-pcs
mailing list