From jawad at snf.stanford.edu Mon Apr 7 11:55:49 2003 From: jawad at snf.stanford.edu (jawad at snf.stanford.edu) Date: Apr 7, 2003 11:55:49 PM Subject: Problem amtetcher 2003-04-07 23:55:49: Report Problem for amtetcher Message-ID: it crashed in the middle of the run. beware From booth at snf.stanford.edu Tue Apr 8 07:03:51 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 8, 2003 7:03:51 AM Subject: Problem amtetcher 2003-04-07 23:55:49: Report Clear for amtetcher Message-ID: not able to decipher problem report. From kailash at snf.stanford.edu Wed Apr 9 01:56:43 2003 From: kailash at snf.stanford.edu (kailash at snf.stanford.edu) Date: Apr 9, 2003 1:56:43 AM Subject: Shutdown amtetcher 2003-04-09 01:56:42: Report Shutdown for amtetcher Message-ID: Saw arcing during 1 etch (etch not complete). Removed wafers. Saw that electrodes 2,3 and 5 have arcing marks (black) on top. Process 2 run and machine shurdown. From booth at snf.stanford.edu Wed Apr 9 08:26:00 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 9, 2003 8:26:00 AM Subject: Shutdown amtetcher 2003-04-09 08:25:58: Report Shutdown for amtetcher Message-ID: Pump Maintenance needed brfore vane pump is started again. Motorguard filtration unit must be cleaned also. From booth at snf.stanford.edu Thu Apr 10 01:17:17 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Apr 10, 2003 1:17:17 PM Subject: Shutdown amtetcher 2003-04-09 08:25:58: Report Clear for amtetcher Message-ID: serviced vane pump, filter, demister. Filled pump with 13 kilos new Fomblin 16/6 Restarted system. Arcing on trays needs repair. From cbaxter at snf.stanford.edu Thu Apr 10 07:34:50 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 10, 2003 7:34:50 PM Subject: Shutdown amtetcher 2003-04-09 01:56:42: Report Clear for amtetcher Message-ID: assemble tray and ran season recipe. From mislam at snf.stanford.edu Wed Apr 16 09:42:59 2003 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Apr 16, 2003 9:42:59 AM Subject: Shutdown amtetcher 2003-04-16 09:42:58: Report Shutdown for amtetcher Message-ID: Arcing mark on tray #3. From hphan at snf.stanford.edu Wed Apr 16 11:09:02 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Apr 16, 2003 11:09:02 AM Subject: Shutdown amtetcher 2003-04-16 09:42:58: Removed arcing, seasoning now. Message-ID: From kailash at snf.stanford.edu Sun Apr 20 02:32:39 2003 From: kailash at snf.stanford.edu (kailash at snf.stanford.edu) Date: Apr 20, 2003 2:32:39 PM Subject: Shutdown amtetcher 2003-04-20 14:32:38: Report Shutdown for amtetcher Message-ID: Arcing mark on tray 5 From hphan at snf.stanford.edu Mon Apr 21 11:24:32 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Apr 21, 2003 11:24:32 AM Subject: Shutdown amtetcher 2003-04-20 14:32:38: Removed Arcing and Seasoning now. Message-ID: From cbaxter at snf.stanford.edu Thu Apr 24 05:45:20 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 24, 2003 5:45:20 PM Subject: Shutdown amtetcher 2003-04-24 17:45:19: Report Shutdown for amtetcher Message-ID: arcing on tray1 From cbaxter at snf.stanford.edu Thu Apr 24 11:40:46 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 24, 2003 11:40:46 PM Subject: Shutdown amtetcher 2003-04-24 17:45:19: Report Clear for amtetcher Message-ID: cleaned up arcing and ran seasoning From mislam at snf.stanford.edu Fri Apr 25 11:07:46 2003 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Apr 25, 2003 11:07:46 AM Subject: Shutdown amtetcher 2003-04-25 11:07:42: Report Shutdown for amtetcher Message-ID: Small arcing mark on tray #6 I checked all trays before starting, did not see any arcing mark. Ran 10 min nitride recipe and found the arcing mark on tray #6 while unloading my wafer. I observed bias voltage during the run, it was ok. From hphan at snf.stanford.edu Fri Apr 25 04:12:11 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Apr 25, 2003 4:12:11 PM Subject: Shutdown amtetcher 2003-04-25 11:07:42: Removed Arcing. Message-ID: From jdas at snf.stanford.edu Wed Apr 30 02:24:08 2003 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: Apr 30, 2003 2:24:08 PM Subject: Problem amtetcher 2003-04-30 14:24:08: Vacuum wand not working OK Message-ID: The Quartz tip looks like it is ready to fall of From cbaxter at snf.stanford.edu Wed Apr 30 06:21:32 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Apr 30, 2003 6:21:32 PM Subject: Problem amtetcher 2003-04-30 14:24:08: Report Clear for amtetcher Message-ID: changed quartz tip