From crichter at snf.stanford.edu Mon Aug 4 04:16:24 2003 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Aug 4, 2003 4:16:24 PM Subject: Problem amtetcher 2003-08-04 16:16:24: cracks found Message-ID: During inspection, chamber 4 top wafer holder has cracks on the plastic casing From hphan at snf.stanford.edu Mon Aug 4 04:43:37 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Aug 4, 2003 4:43:37 PM Subject: Problem amtetcher 2003-08-04 16:16:24: Report Clear for amtetcher Message-ID: Changed new ardel. From bwacker at snf.stanford.edu Thu Aug 14 08:32:09 2003 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: Aug 14, 2003 8:32:09 PM Subject: Shutdown amtetcher 2003-08-14 20:32:09: Report Shutdown for amtetcher Message-ID: Arcing on one clamp From hphan at snf.stanford.edu Fri Aug 15 10:57:22 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Aug 15, 2003 10:57:22 AM Subject: Shutdown amtetcher 2003-08-14 20:32:09: Fix Message-ID: From afreeman at snf.stanford.edu Sun Aug 17 12:02:16 2003 From: afreeman at snf.stanford.edu (afreeman at snf.stanford.edu) Date: Aug 17, 2003 12:02:16 AM Subject: Problem amtetcher 2003-08-17 00:02:16: Report Problem for amtetcher Message-ID: gas panel exhaust fail, jog does not work, From cbaxter at snf.stanford.edu Mon Aug 18 07:26:31 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 18, 2003 7:26:31 AM Subject: Problem amtetcher 2003-08-17 00:02:16: Report Clear for amtetcher Message-ID: home hex and run recipe#3. system working fine From sigari at snf.stanford.edu Tue Aug 19 12:48:46 2003 From: sigari at snf.stanford.edu (sigari at snf.stanford.edu) Date: Aug 19, 2003 12:48:46 PM Subject: Shutdown amtetcher 2003-08-19 12:48:45: Report Shutdown for amtetcher Message-ID: Very load noise from back of the system. From booth at snf.stanford.edu Tue Aug 19 01:38:12 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 19, 2003 1:38:12 PM Subject: Shutdown amtetcher 2003-08-19 12:48:45: Report Clear for amtetcher Message-ID: replaced broken 3/8 polyflow N2 line to back of process unit. From sams at snf.stanford.edu Wed Aug 20 07:11:05 2003 From: sams at snf.stanford.edu (sams at snf.stanford.edu) Date: Aug 20, 2003 7:11:05 AM Subject: Shutdown amtetcher 2003-08-20 07:11:05: Report Shutdown for amtetcher Message-ID: Tray 4 is slightly loose From booth at snf.stanford.edu Wed Aug 20 07:17:21 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Aug 20, 2003 7:17:21 AM Subject: Shutdown amtetcher 2003-08-20 07:11:05: Report Clear for amtetcher Message-ID: Tray #4 was very noticably loose. Adjusted tray #4 & checked all trays. Wiped up broken wafer pieces from baseplate and ground collar at bottom of hex. From jdas at snf.stanford.edu Wed Aug 20 11:10:46 2003 From: jdas at snf.stanford.edu (jdas at snf.stanford.edu) Date: Aug 20, 2003 11:10:46 AM Subject: Shutdown amtetcher 2003-08-20 11:10:45: some brown spots on rop latch of pannel # 2 Message-ID: From hphan at snf.stanford.edu Wed Aug 20 04:07:41 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Aug 20, 2003 4:07:41 PM Subject: Shutdown amtetcher 2003-08-20 11:10:45: Fixed and seasoning. Message-ID: From sigari at snf.stanford.edu Thu Aug 21 12:34:36 2003 From: sigari at snf.stanford.edu (sigari at snf.stanford.edu) Date: Aug 21, 2003 12:34:36 PM Subject: Shutdown amtetcher 2003-08-21 12:34:35: Report Shutdown for amtetcher Message-ID: Sign of arching or burning (brown residue) on tray #2 close to the latch area. From sigari at snf.stanford.edu Thu Aug 21 12:35:33 2003 From: sigari at snf.stanford.edu (sigari at snf.stanford.edu) Date: Aug 21, 2003 12:35:33 PM Subject: Shutdown amtetcher 2003-08-21 12:35:30: Report Shutdown for amtetcher Message-ID: SIgn of arching or burning (dark brown residue) close to the latch in tray #2 From hphan at snf.stanford.edu Thu Aug 21 05:27:52 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Aug 21, 2003 5:27:52 PM Subject: Shutdown amtetcher 2003-08-21 12:35:30: Fixed and Seasoning Message-ID: From hphan at snf.stanford.edu Thu Aug 21 05:28:31 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Aug 21, 2003 5:28:31 PM Subject: Shutdown amtetcher 2003-08-21 12:34:35: Fixed Message-ID: From crichter at snf.stanford.edu Tue Aug 26 04:46:10 2003 From: crichter at snf.stanford.edu (crichter at snf.stanford.edu) Date: Aug 26, 2003 4:46:10 PM Subject: Problem amtetcher 2003-08-26 16:46:09: electrodes dirty Message-ID: Some electrodes left some white particles on some of my wafers. Chambers used were 1- 3 From cbaxter at snf.stanford.edu Tue Aug 26 04:54:19 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 26, 2003 4:54:19 PM Subject: Shutdown amtetcher 2003-08-26 16:54:18: Report Shutdown for amtetcher Message-ID: tool should on shutdown From cbaxter at snf.stanford.edu Tue Aug 26 06:04:15 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 26, 2003 6:04:15 PM Subject: Shutdown amtetcher 2003-08-26 16:54:18: Report Clear for amtetcher Message-ID: vented chamber and cleaned pedestals. From cbaxter at snf.stanford.edu Tue Aug 26 06:04:25 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Aug 26, 2003 6:04:25 PM Subject: Problem amtetcher 2003-08-26 16:46:09: Report Clear for amtetcher Message-ID: