From iwjung at snf.stanford.edu Mon Dec 1 22:12:05 2003 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Mon, 1 Dec 2003 22:12:05 -0800 Subject: Problem amtetcher 2003-12-01 22:12:04: low bias on couple of runs (pgrm 3) Message-ID: From booth at snf.stanford.edu Tue Dec 2 06:16:14 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Tue, 2 Dec 2003 06:16:14 -0800 Subject: Comment amtetcher 2003-11-18 16:11:15: Polymer Cleanup Message-ID: acknowledged. From qwang at snf.stanford.edu Tue Dec 2 07:46:48 2003 From: qwang at snf.stanford.edu (qwang at snf.stanford.edu) Date: Tue, 2 Dec 2003 07:46:48 -0800 Subject: Comment amtetcher 2003-12-02 07:46:47: bias is fine Message-ID: At begin of seasening, bias is as low as 470 and runing is auto stop. After several re-running, the bias is up to 530 as normal From sigari at snf.stanford.edu Tue Dec 2 09:48:22 2003 From: sigari at snf.stanford.edu (sigari at snf.stanford.edu) Date: Tue, 2 Dec 2003 09:48:22 -0800 Subject: Shutdown amtetcher 2003-12-02 09:48:22: arching Message-ID: The evidence of arching in the upper edge of the tray #4. From hphan at snf.stanford.edu Tue Dec 2 11:25:38 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Tue, 2 Dec 2003 11:25:38 -0800 Subject: Shutdown amtetcher 2003-12-02 09:48:22: arching Message-ID: From hphan at snf.stanford.edu Tue Dec 2 11:25:52 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Tue, 2 Dec 2003 11:25:52 -0800 Subject: Comment amtetcher 2003-12-02 07:46:47: bias is fine Message-ID: From hphan at snf.stanford.edu Tue Dec 2 11:26:25 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Tue, 2 Dec 2003 11:26:25 -0800 Subject: Problem amtetcher 2003-12-01 22:12:04: low bias on couple of runs (pgrm 3) Message-ID: From bwacker at snf.stanford.edu Tue Dec 2 13:37:26 2003 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: Tue, 2 Dec 2003 13:37:26 -0800 Subject: Shutdown amtetcher 2003-12-02 13:37:25: Burnt 3-rd clamp Message-ID: From hphan at snf.stanford.edu Tue Dec 2 15:12:55 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Tue, 2 Dec 2003 15:12:55 -0800 Subject: Shutdown amtetcher 2003-12-02 13:37:25: Burnt 3-rd clamp Message-ID: From kailash at snf.stanford.edu Tue Dec 2 23:05:43 2003 From: kailash at snf.stanford.edu (kailash at snf.stanford.edu) Date: Tue, 2 Dec 2003 23:05:43 -0800 Subject: Problem amtetcher 2003-12-02 23:05:42: Dc bias problem Message-ID: DC bias did not initially come up to desired value in #3. Multiple retries eventually got it up during the seasoning. Did seasoning for 15 minutes but had the same problem during actual etch. From hphan at snf.stanford.edu Wed Dec 3 10:12:34 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Wed, 3 Dec 2003 10:12:34 -0800 Subject: Problem amtetcher 2003-12-02 23:05:42: Dc bias problem Message-ID: I ran program #3 and I got the DC bias problem too. So I Changed the base pressure from .80 mTorr to .20 mTorr, then the DC bias picking up slowly. Now the base pressure of program #3 is setting at .20 mTorr instead of .80 mTorr. Be patient, it's gonna take a little longer time to pump down. gonna a little bit longer time to pump down. From daesung at snf.stanford.edu Wed Dec 3 11:07:31 2003 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Wed, 3 Dec 2003 11:07:31 -0800 Subject: Problem amtetcher 2003-12-03 11:07:30: Low DC bias Message-ID: From hphan at snf.stanford.edu Wed Dec 3 13:54:49 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Wed, 3 Dec 2003 13:54:49 -0800 Subject: Shutdown amtetcher 2003-12-03 13:54:48: Low DC bias caused process fail Message-ID: From booth at snf.stanford.edu Thu Dec 4 07:21:12 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Thu, 4 Dec 2003 07:21:12 -0800 Subject: Shutdown amtetcher 2003-12-03 13:54:48: Low DC bias caused process fail Message-ID: Checked RF power & match network - OK. Found wafer trays not adjusted correctly, I readjusted all of them, then ran std Process#3 3 times, got correct RF pwr & DC Bias all 3 times. From booth at snf.stanford.edu Thu Dec 4 10:36:55 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Thu, 4 Dec 2003 10:36:55 -0800 Subject: Problem amtetcher 2003-12-03 11:07:30: Low DC bias Message-ID: This was changed to a shutdown. From daesung at snf.stanford.edu Fri Dec 5 00:43:44 2003 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Fri, 5 Dec 2003 00:43:44 -0800 Subject: Problem amtetcher 2003-12-05 00:43:43: Low DC bias Message-ID: From sigari at snf.stanford.edu Fri Dec 5 13:46:15 2003 From: sigari at snf.stanford.edu (sigari at snf.stanford.edu) Date: Fri, 5 Dec 2003 13:46:15 -0800 Subject: Shutdown amtetcher 2003-12-05 13:46:14: arching Message-ID: Arching evidence in upper edge of tray 3 and 5. From cbaxter at snf.stanford.edu Fri Dec 5 19:43:48 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 5 Dec 2003 19:43:48 -0800 Subject: Shutdown amtetcher 2003-12-05 13:46:14: arching Message-ID: cleaned up arcing on tray#2 and 5 From cbaxter at snf.stanford.edu Fri Dec 5 19:44:49 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 5 Dec 2003 19:44:49 -0800 Subject: Problem amtetcher 2003-12-05 00:43:43: Low DC bias Message-ID: after cleaning up arcing, i run a 20 mins seasoning and bias voltage was ok at-525v From hansen at snf.stanford.edu Sat Dec 6 14:18:40 2003 From: hansen at snf.stanford.edu (hansen at snf.stanford.edu) Date: Sat, 6 Dec 2003 14:18:40 -0800 Subject: Problem amtetcher 2003-12-06 14:18:39: previous arcing visible Message-ID: Before using machine, I noticed signs of previous arcing, specifically on trays #3 and #5, which was noted yesterday. I'm not sure if "cleaning" that was done yesterday gets rid of all signs of previous arcing or if this might represent new arcing. I did not observe any arcing or additional damage while using the machine. From quickwin at snf.stanford.edu Sun Dec 7 17:17:52 2003 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Sun, 7 Dec 2003 17:17:52 -0800 Subject: Shutdown amtetcher 2003-12-07 17:17:52: Four trays have arcing damage Message-ID: Before I did any etching, I noticed arcing damage. From cbaxter at snf.stanford.edu Mon Dec 8 22:33:06 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 8 Dec 2003 22:33:06 -0800 Subject: Shutdown amtetcher 2003-12-07 17:17:52: Four trays have arcing damage Message-ID: Len, cleaned up arcing on trays. I assemble trays and cleaned chamber base plate From cbaxter at snf.stanford.edu Mon Dec 8 22:33:16 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 8 Dec 2003 22:33:16 -0800 Subject: Problem amtetcher 2003-12-06 14:18:39: previous arcing visible Message-ID: From hanjun at snf.stanford.edu Tue Dec 9 12:45:21 2003 From: hanjun at snf.stanford.edu (hanjun at snf.stanford.edu) Date: Tue, 9 Dec 2003 12:45:21 -0800 Subject: Shutdown amtetcher 2003-12-09 12:45:20: arcing Message-ID: arcing - 5th tray at the top latch From hphan at snf.stanford.edu Tue Dec 9 15:06:53 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Tue, 9 Dec 2003 15:06:53 -0800 Subject: Shutdown amtetcher 2003-12-09 12:45:20: arcing Message-ID: From xiangli at snf.stanford.edu Thu Dec 11 21:43:17 2003 From: xiangli at snf.stanford.edu (xiangli at snf.stanford.edu) Date: Thu, 11 Dec 2003 21:43:17 -0800 Subject: Problem amtetcher 2003-12-11 21:43:16: Before processing found arc on 2th and 5th panels Message-ID: From cbaxter at snf.stanford.edu Thu Dec 11 23:49:22 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 11 Dec 2003 23:49:22 -0800 Subject: Problem amtetcher 2003-12-11 21:43:16: Before processing found arc on 2th and 5th panels Message-ID: cleaned up arcing on trays From jnee at snf.stanford.edu Fri Dec 12 13:43:38 2003 From: jnee at snf.stanford.edu (jnee at snf.stanford.edu) Date: Fri, 12 Dec 2003 13:43:38 -0800 Subject: Shutdown amtetcher 2003-12-12 13:43:38: System quit during or after my process? Message-ID: Running process 3 (standard oxide etch). Set up for a 10 minute etch. I monitored the system through first 2 minutes (everything looked fine). Then when I came back to look at it (maybe 5-10 minutes later) the system is already quit. The screen displays "AME-8100 MICROETCH" and the only lighted buttons other than pressure, power, etc. is "EQUIP ON". I have 3 wafers inside on the first rack. From hphan at snf.stanford.edu Fri Dec 12 14:16:41 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Fri, 12 Dec 2003 14:16:41 -0800 Subject: Shutdown amtetcher 2003-12-12 13:43:38: System quit during or after my process? Message-ID: From rohits at snf.stanford.edu Sat Dec 13 06:42:30 2003 From: rohits at snf.stanford.edu (rohits at snf.stanford.edu) Date: Sat, 13 Dec 2003 06:42:30 -0800 Subject: Problem amtetcher 2003-12-13 06:42:29: low dc bias - process 3 Message-ID: Got low DC bias alarms during seasoning and actual run- was able to continue the process without any problems. Carefully checked for signs of arcing but didn't find anything. I was running process 3 - etching SiO2 on wafers with very high resist coverage. Pumped down to 0.2mT base pressure (instead of standard 0.8mT.) From lindaw at snf.stanford.edu Sat Dec 13 13:59:55 2003 From: lindaw at snf.stanford.edu (lindaw at snf.stanford.edu) Date: Sat, 13 Dec 2003 13:59:55 -0800 Subject: Shutdown amtetcher 2003-12-13 13:59:54: Arcing on latch of tray 5 Message-ID: I ran a 16 min run to season the chamber, no signs of arcing. Then 16 min of device wafers, no signs of arcing. 2nd run of device wafers, no signs of arcing. After third 16 min run of device afers, signs of arcing behind the latch on tray 5. I noticed a foul odor near the end of the run, but thought it was coming from user unloading drytek1. I did not see and dips in the bias voltage durning the run. From hphan at snf.stanford.edu Mon Dec 15 13:33:16 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Mon, 15 Dec 2003 13:33:16 -0800 Subject: Shutdown amtetcher 2003-12-13 13:59:54: Arcing on latch of tray 5 Message-ID: From hphan at snf.stanford.edu Mon Dec 15 13:33:30 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Mon, 15 Dec 2003 13:33:30 -0800 Subject: Problem amtetcher 2003-12-13 06:42:29: low dc bias - process 3 Message-ID: From ychliu at snf.stanford.edu Mon Dec 15 13:51:03 2003 From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu) Date: Mon, 15 Dec 2003 13:51:03 -0800 Subject: Shutdown amtetcher 2003-12-15 13:51:02: Arcing spots on top of trays 1, 3, 4 Message-ID: The spots were found before any recipe was run. From hphan at snf.stanford.edu Mon Dec 15 15:25:35 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Mon, 15 Dec 2003 15:25:35 -0800 Subject: Shutdown amtetcher 2003-12-15 13:51:02: Arcing spots on top of trays 1, 3, 4 Message-ID: From daesung at snf.stanford.edu Mon Dec 15 16:03:11 2003 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Mon, 15 Dec 2003 16:03:11 -0800 Subject: Shutdown amtetcher 2003-12-15 16:03:11: Arcing in tray 3 Message-ID: From daesung at snf.stanford.edu Mon Dec 15 16:03:33 2003 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Mon, 15 Dec 2003 16:03:33 -0800 Subject: Shutdown amtetcher 2003-12-15 16:03:32: Arcing in tray 3 Message-ID: From mcvittie at snf.stanford.edu Mon Dec 15 16:06:50 2003 From: mcvittie at snf.stanford.edu (Jim McVittie) Date: Mon, 15 Dec 2003 16:06:50 -0800 Subject: Shutdown amtetcher 2003-12-15 16:03:32: Arcing in tray 3 Message-ID: <3FDE4C9A.704FA579@snf.stanford.edu> Amtetcher Users, I will look at the rf waveform to see if there is something wrong with the RF. 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Name: mcvittie.vcf Type: text/x-vcard Size: 422 bytes Desc: Card for Jim McVittie URL: From cbaxter at snf.stanford.edu Mon Dec 15 18:29:44 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 15 Dec 2003 18:29:44 -0800 Subject: Shutdown amtetcher 2003-12-15 16:03:32: Arcing in tray 3 Message-ID: cleaned arcing on tray#3 From cbaxter at snf.stanford.edu Mon Dec 15 18:29:58 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 15 Dec 2003 18:29:58 -0800 Subject: Shutdown amtetcher 2003-12-15 16:03:11: Arcing in tray 3 Message-ID: cleaned arcing From daesung at snf.stanford.edu Tue Dec 16 06:43:26 2003 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Tue, 16 Dec 2003 06:43:26 -0800 Subject: Shutdown amtetcher 2003-12-16 06:43:25: arcing in tray 2, 5 Message-ID: From hphan at snf.stanford.edu Tue Dec 16 11:40:13 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Tue, 16 Dec 2003 11:40:13 -0800 Subject: Shutdown amtetcher 2003-12-16 06:43:25: arcing in tray 2, 5 Message-ID: From daesung at snf.stanford.edu Wed Dec 17 03:37:52 2003 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Wed, 17 Dec 2003 03:37:52 -0800 Subject: Shutdown amtetcher 2003-12-17 03:37:51: Arcing in tray 2 Message-ID: