Problem amtetcher 2003-12-02 23:05:42: Dc bias problem

kailash at snf.stanford.edu kailash at snf.stanford.edu
Tue Dec 2 23:05:43 PST 2003


DC bias did not initially come up to desired value in #3. Multiple retries eventually got it up during the seasoning. Did seasoning for 15 minutes but had the same problem during actual etch.  




More information about the amtetcher-pcs mailing list