Problem amtetcher 2003-12-02 23:05:42: Dc bias problem

hphan at hphan at
Wed Dec 3 10:12:34 PST 2003

I ran program #3 and I got the DC bias problem too. So I 
Changed the base pressure from .80 mTorr to .20 mTorr, then 
the DC bias picking up slowly. Now the base pressure of 
program #3 is setting at .20 mTorr instead of .80 mTorr. 
Be patient, it's gonna take a little longer time to pump down.  
gonna a little bit longer time to pump down.  

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