Shutdown amtetcher 2003-12-03 13:54:48: Low DC bias caused process fail

booth at snf.stanford.edu booth at snf.stanford.edu
Thu Dec 4 07:21:12 PST 2003


Checked RF power & match network - OK.
Found wafer trays not adjusted correctly,
I readjusted all of them, then ran std Process#3
3 times, got correct RF pwr & DC Bias all 3 times.




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