Problem amtetcher 2003-12-13 06:42:29: low dc bias - process 3

rohits at snf.stanford.edu rohits at snf.stanford.edu
Sat Dec 13 06:42:30 PST 2003


Got low DC bias alarms during seasoning and actual run- was able to continue the process without any problems. Carefully checked for signs of arcing but didn't find anything. I was running process 3 - etching SiO2 on wafers with very high resist coverage. Pumped down to 0.2mT base pressure (instead of standard 0.8mT.)




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