Problem amtetcher 2003-12-13 06:42:29: low dc bias - process 3
hphan at snf.stanford.edu
hphan at snf.stanford.edu
Mon Dec 15 13:33:30 PST 2003
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Problem amtetcher 2003-12-13 06:42:29: low dc bias - process 3
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Shutdown amtetcher 2003-12-13 13:59:54: Arcing on latch of tray 5
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Problem amtetcher 2003-12-13 06:42:29: low dc bias - process 3
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Shutdown amtetcher 2003-12-13 13:59:54: Arcing on latch of tray 5
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