From mislam at snf.stanford.edu  Sat Feb  1 11:05:55 2003
From: mislam at snf.stanford.edu (mislam at snf.stanford.edu)
Date: Feb 1, 2003 11:05:55 AM
Subject: Problem amtetcher 2003-02-01 11:05:54: Vacuum wand broken
Message-ID: <mailman.362.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

There seems to be a missing spring
for the vacuum release button on the
wafer pickup vacuum wand.
Button is always in the release position
and won't pickup wafer.



From booth at snf.stanford.edu  Thu Feb  6 12:57:17 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Feb 6, 2003 12:57:17 PM
Subject: Problem amtetcher 2003-02-01 11:05:54: Vacuum wand broken
Message-ID: <mailman.363.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

replaced vac wand handle



From yetao at snf.stanford.edu  Sat Feb  8 10:50:39 2003
From: yetao at snf.stanford.edu (yetao at snf.stanford.edu)
Date: Feb 8, 2003 10:50:39 PM
Subject: Problem amtetcher 2003-02-08 22:50:38: vacuum tweezer broken
Message-ID: <mailman.364.1357938218.25670.amtetcher-pcs@snf.stanford.edu>




From jdas at snf.stanford.edu  Sat Feb 15 11:42:49 2003
From: jdas at snf.stanford.edu (jdas at snf.stanford.edu)
Date: Feb 15, 2003 11:42:49 AM
Subject: Problem amtetcher 2003-02-15 11:42:48: spring missing from Vac. wand
Message-ID: <mailman.365.1357938218.25670.amtetcher-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Tue Feb 18 07:25:34 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Feb 18, 2003 7:25:34 AM
Subject: Problem amtetcher 2003-02-15 11:42:48: spring missing from Vac. wand
Message-ID: <mailman.366.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

replaced broken vacuum wand handle.



From jdas at snf.stanford.edu  Tue Feb 18 09:04:11 2003
From: jdas at snf.stanford.edu (jdas at snf.stanford.edu)
Date: Feb 18, 2003 9:04:11 AM
Subject: Shutdown amtetcher 2003-02-18 09:04:10: Arcing mark noticed before processing
Message-ID: <mailman.367.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

Arcing mark observed  at plate 6 on top edge near the latch



From cbaxter at snf.stanford.edu  Tue Feb 18 08:13:37 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Feb 18, 2003 8:13:37 PM
Subject: Shutdown amtetcher 2003-02-18 09:04:10: Arcing mark noticed before processing
Message-ID: <mailman.368.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

henry changed one ardel tray insulator on tray#6 and condition
the chamber



From hphan at snf.stanford.edu  Wed Feb 19 09:46:29 2003
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Feb 19, 2003 9:46:29 AM
Subject: Shutdown amtetcher 2003-02-19 09:46:27: Arcinig on tray #2
Message-ID: <mailman.369.1357938218.25670.amtetcher-pcs@snf.stanford.edu>




From hphan at snf.stanford.edu  Wed Feb 19 10:33:10 2003
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Feb 19, 2003 10:33:10 AM
Subject: Shutdown amtetcher 2003-02-19 09:46:27: Removed Arcinig
Message-ID: <mailman.370.1357938218.25670.amtetcher-pcs@snf.stanford.edu>