From booth at snf.stanford.edu  Thu Jan  2 09:37:34 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jan 2, 2003 9:37:34 AM
Subject: Shutdown amtetcher 2002-12-18 06:28:10: Shutdown for maintenance
Message-ID: <mailman.347.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

restarted after Xmas Shutdown.



From rcrane at snf.stanford.edu  Thu Jan  2 03:45:03 2003
From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu)
Date: Jan 2, 2003 3:45:03 PM
Subject: Problem amtetcher 2003-01-02 15:45:02: ok to use, needs qual run
Message-ID: <mailman.348.1357938218.25670.amtetcher-pcs@snf.stanford.edu>




From hphan at snf.stanford.edu  Mon Jan  6 03:55:26 2003
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Jan 6, 2003 3:55:26 PM
Subject: Problem amtetcher 2003-01-02 15:45:02: Ready to use, etch rate corss wafer > 5%
Message-ID: <mailman.349.1357938218.25670.amtetcher-pcs@snf.stanford.edu>




From quickwin at snf.stanford.edu  Tue Jan  7 12:17:46 2003
From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu)
Date: Jan 7, 2003 12:17:46 AM
Subject: Shutdown amtetcher 2003-01-07 00:17:46: arcing
Message-ID: <mailman.350.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

Arcing along every seam between trays. Bright arcing spot noticed at vacuum duct entrance.



From hphan at snf.stanford.edu  Tue Jan  7 11:06:38 2003
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Jan 7, 2003 11:06:38 AM
Subject: Shutdown amtetcher 2003-01-07 00:17:46: OK Now
Message-ID: <mailman.351.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

Len Ckeck all the trays and they look find. I also ran a seasoning as well. The user saw during the process is the flashing between the trays, not Arcing.



From wliu at snf.stanford.edu  Wed Jan  8 11:41:49 2003
From: wliu at snf.stanford.edu (wliu at snf.stanford.edu)
Date: Jan 8, 2003 11:41:49 PM
Subject: Problem amtetcher 2003-01-08 23:41:46: arcing
Message-ID: <mailman.352.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

observed arcing in several spots...specifically between the electrodes...



From hphan at snf.stanford.edu  Thu Jan  9 09:56:48 2003
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Jan 9, 2003 9:56:48 AM
Subject: Problem amtetcher 2003-01-08 23:41:46: All trays look ok. I think that's the Flashing.
Message-ID: <mailman.353.1357938218.25670.amtetcher-pcs@snf.stanford.edu>




From beckwith at snf.stanford.edu  Fri Jan 17 05:57:03 2003
From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu)
Date: Jan 17, 2003 5:57:03 PM
Subject: Problem amtetcher 2003-01-17 17:57:02: trays seem to be loose...
Message-ID: <mailman.354.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

maybe this is the reason for all the flashing?



From hphan at snf.stanford.edu  Tue Jan 21 02:15:06 2003
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Jan 21, 2003 2:15:06 PM
Subject: Problem amtetcher 2003-01-17 17:57:02: Check all trays and they look OK.
Message-ID: <mailman.355.1357938218.25670.amtetcher-pcs@snf.stanford.edu>




From beckwith at snf.stanford.edu  Wed Jan 22 12:52:49 2003
From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu)
Date: Jan 22, 2003 12:52:49 PM
Subject: Problem amtetcher 2003-01-22 12:52:49: alarm button is off, but alarm is still sounding????
Message-ID: <mailman.356.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

this will soon drive everyone in the aisle crazy!



From rcrane at snf.stanford.edu  Wed Jan 22 02:55:30 2003
From: rcrane at snf.stanford.edu (rcrane at snf.stanford.edu)
Date: Jan 22, 2003 2:55:30 PM
Subject: Problem amtetcher 2003-01-22 12:52:49: alarm button is off, but alarm is still sounding????
Message-ID: <mailman.357.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

Cycled alarm push buttom. Alarmed cleared, machine is quiet.



From booth at snf.stanford.edu  Fri Jan 24 07:36:15 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jan 24, 2003 7:36:15 AM
Subject: Shutdown amtetcher 2003-01-24 07:36:14: found etcher powered OFF
Message-ID: <mailman.358.1357938218.25670.amtetcher-pcs@snf.stanford.edu>




From booth at snf.stanford.edu  Fri Jan 24 07:55:02 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Jan 24, 2003 7:55:02 AM
Subject: Shutdown amtetcher 2003-01-24 07:36:14: found etcher powered OFF
Message-ID: <mailman.359.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

restarted etcher, put into standby, looks normal.



From yyao at snf.stanford.edu  Wed Jan 29 09:01:56 2003
From: yyao at snf.stanford.edu (yyao at snf.stanford.edu)
Date: Jan 29, 2003 9:01:56 AM
Subject: Shutdown amtetcher 2003-01-29 09:01:56: manometer leak
Message-ID: <mailman.360.1357938218.25670.amtetcher-pcs@snf.stanford.edu>




From hphan at snf.stanford.edu  Wed Jan 29 09:26:33 2003
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Jan 29, 2003 9:26:33 AM
Subject: Shutdown amtetcher 2003-01-29 09:01:56: Message go away
Message-ID: <mailman.361.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

I aborted the process #2 and  vented the chamber, then pumped down again. the message go away. 



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From: upxaachxxze at xaadkici.com (nreouovrguo)
Date: Fri, 3 Jan 2003 01:09:26 +0800
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