From beckwith at snf.stanford.edu  Mon Mar  3 12:25:39 2003
From: beckwith at snf.stanford.edu (beckwith at snf.stanford.edu)
Date: Mar 3, 2003 12:25:39 PM
Subject: Comment amtetcher 2003-03-03 12:25:39: cryo pump?
Message-ID: <mailman.371.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

What is happeing with the cryo pump? Today it took 13 min.
for the turbo to pump down the chamber. Twice it alarmed 
telling me that the turbo could not pump down the chamber. 
I know this is a good source of income for SNF, but from my 
standpoint it is a waste of my time.
Is the cryo being repaired? Replaced? And when will it be
back in service? It has been gone for a long while now.



From hphan at snf.stanford.edu  Wed Mar  5 09:13:16 2003
From: hphan at snf.stanford.edu (Henry Phan)
Date: Wed, 05 Mar 2003 09:13:16 -0800
Subject: [Fwd: Updated Etch Rate and Operating procedure]
Message-ID: <3E66302C.B8380432@snf.stanford.edu>


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From una at snf.stanford.edu  Thu Mar  6 05:20:47 2003
From: una at snf.stanford.edu (una at snf.stanford.edu)
Date: Mar 6, 2003 5:20:47 PM
Subject: Shutdown amtetcher 2003-03-06 17:20:47: Report Shutdown for amtetcher
Message-ID: <mailman.372.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

I was checking the hexode before starting to use the AMTetcher and I noticed that the top of the last tray showed that there had been arcing.  So, I am shutting it down instead of using it.
Anu



From cbaxter at snf.stanford.edu  Thu Mar  6 09:48:30 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mar 6, 2003 9:48:30 PM
Subject: Shutdown amtetcher 2003-03-06 17:20:47: Report Clear for amtetcher
Message-ID: <mailman.373.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

vented chamber, removed and changed burn ardel
shield.



From evelyn at snf.stanford.edu  Thu Mar 13 03:24:49 2003
From: evelyn at snf.stanford.edu (evelyn at snf.stanford.edu)
Date: Mar 13, 2003 3:24:49 PM
Subject: Shutdown amtetcher 2003-03-13 15:24:49: Report Shutdown for amtetcher
Message-ID: <mailman.374.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

tray #2 had arching



From evelyn at snf.stanford.edu  Thu Mar 13 03:35:32 2003
From: evelyn at snf.stanford.edu (evelyn at snf.stanford.edu)
Date: Mar 13, 2003 3:35:32 PM
Subject: Comment amtetcher 2003-03-13 15:35:31: Report Comment for amtetcher
Message-ID: <mailman.375.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

I made a mistake.....it's tray #3 that arched.......



From hphan at snf.stanford.edu  Thu Mar 13 04:35:52 2003
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Mar 13, 2003 4:35:52 PM
Subject: Shutdown amtetcher 2003-03-13 15:24:49: Report Clear for amtetcher
Message-ID: <mailman.376.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

Remove arcing and run a seasoning.



From quickwin at snf.stanford.edu  Fri Mar 14 09:57:16 2003
From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu)
Date: Mar 14, 2003 9:57:16 PM
Subject: Shutdown amtetcher 2003-03-14 21:57:16: system circuit breaker tripped.
Message-ID: <mailman.377.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

I was hoisting up the bell jar when the circuit breaker tripped. No power to the machine.



From cbaxter at snf.stanford.edu  Fri Mar 14 10:06:54 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mar 14, 2003 10:06:54 PM
Subject: Shutdown amtetcher 2003-03-14 21:57:16: Report Clear for amtetcher
Message-ID: <mailman.378.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

system tripped while hoist was going up. reset breaker
on main ac remote and power system.



From quickwin at snf.stanford.edu  Sun Mar 16 10:20:22 2003
From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu)
Date: Mar 16, 2003 10:20:22 AM
Subject: Problem amtetcher 2003-03-16 10:20:18: Report Problem for amtetcher
Message-ID: <mailman.379.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

Machine gave alarm "Cold water level low".



From quickwin at snf.stanford.edu  Sun Mar 16 10:24:55 2003
From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu)
Date: Mar 16, 2003 10:24:55 AM
Subject: Problem amtetcher 2003-03-16 10:24:54: Report Problem for amtetcher
Message-ID: <mailman.380.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

Turbo is down. System is not ready.



From booth at snf.stanford.edu  Mon Mar 17 09:37:08 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Mar 17, 2003 9:37:08 AM
Subject: Problem amtetcher 2003-03-16 10:20:18: Report Clear for amtetcher
Message-ID: <mailman.381.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

Filled resevoir with DI water.



From booth at snf.stanford.edu  Mon Mar 17 09:55:40 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Mar 17, 2003 9:55:40 AM
Subject: Problem amtetcher 2003-03-16 10:24:54: Report Clear for amtetcher
Message-ID: <mailman.382.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

This should have been a Shutdown message.



From booth at snf.stanford.edu  Mon Mar 17 09:58:36 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Mar 17, 2003 9:58:36 AM
Subject: Shutdown amtetcher 2003-03-17 09:58:36: Report Shutdown for amtetcher
Message-ID: <mailman.383.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

Quickwin should have made this Shutdown report.
Found system in powered down condition, had to
restart from cold, found all tray latches (except #6) loose.
Henry is readjusting them now.
Lubed hoist mecanism.



From booth at snf.stanford.edu  Mon Mar 17 09:59:09 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Mar 17, 2003 9:59:09 AM
Subject: Shutdown amtetcher 2003-03-17 09:58:36: Report Clear for amtetcher
Message-ID: <mailman.384.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

see Shutdown report.



From quickwin at snf.stanford.edu  Mon Mar 17 03:50:51 2003
From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu)
Date: Mar 17, 2003 3:50:51 PM
Subject: Shutdown amtetcher 2003-03-17 15:50:50: Report Shutdown for amtetcher
Message-ID: <mailman.385.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

Arcing in tray 3 top latch.



From cbaxter at snf.stanford.edu  Mon Mar 17 06:00:43 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mar 17, 2003 6:00:43 PM
Subject: Shutdown amtetcher 2003-03-17 15:50:50: Report Clear for amtetcher
Message-ID: <mailman.386.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

replaced burn ardel shield and clean arc mark on tray
latch.



From tzewee at snf.stanford.edu  Fri Mar 21 04:46:59 2003
From: tzewee at snf.stanford.edu (tzewee at snf.stanford.edu)
Date: Mar 21, 2003 4:46:59 AM
Subject: Problem amtetcher 2003-03-21 04:46:59: Report Problem for amtetcher
Message-ID: <mailman.387.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

Dear Staff,
  The AMT is reporting a "Not Ready Low Base PLT TMP". Since I have never seen this message before, I just disabled the AMT without doing anything. I was preparing to season the chamber when I saw the message.
  Thanks.
Tze Wee



From booth at snf.stanford.edu  Fri Mar 21 07:05:46 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Mar 21, 2003 7:05:46 AM
Subject: Problem amtetcher 2003-03-21 04:46:59: Report Clear for amtetcher
Message-ID: <mailman.388.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

fault message cleared after Tzewee enabled/disabled
Maybe the message was latched on the display when
Cesar disabled it last night?
Seems to be running normally now.



From tzewee at snf.stanford.edu  Fri Mar 21 07:40:59 2003
From: tzewee at snf.stanford.edu (tzewee at snf.stanford.edu)
Date: Mar 21, 2003 7:40:59 AM
Subject: Shutdown amtetcher 2003-03-21 07:40:58: Report Shutdown for amtetcher
Message-ID: <mailman.389.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

Dear Staff,
  As instructed by Len after power surge.
Tze Wee



From booth at snf.stanford.edu  Fri Mar 21 10:59:04 2003
From: booth at snf.stanford.edu (booth at snf.stanford.edu)
Date: Mar 21, 2003 10:59:04 AM
Subject: Shutdown amtetcher 2003-03-21 07:40:58: Report Clear for amtetcher
Message-ID: <mailman.390.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

Intermittant symptom of the machine powering itself
off.  I'm clearing this Shutdown temporarily so users
can try to get work done - but system needs to be
checked ASAP.



From mcconnel at snf.stanford.edu  Fri Mar 21 07:17:42 2003
From: mcconnel at snf.stanford.edu (mcconnel at snf.stanford.edu)
Date: Mar 21, 2003 7:17:42 PM
Subject: Shutdown amtetcher 2003-03-21 19:17:39: Report Shutdown for amtetcher
Message-ID: <mailman.391.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

for maintenance



From cbaxter at snf.stanford.edu  Fri Mar 21 11:15:58 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Mar 21, 2003 11:15:58 PM
Subject: Shutdown amtetcher 2003-03-21 19:17:39: Report Clear for amtetcher
Message-ID: <mailman.392.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

adjusted 5vdc on the power supply pcb.



From hphan at snf.stanford.edu  Wed Mar 26 10:46:49 2003
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Mar 26, 2003 10:46:49 AM
Subject: Shutdown amtetcher 2003-03-26 10:46:48: Report Shutdown for amtetcher
Message-ID: <mailman.393.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

Arcing on tray 1 and 3.



From hphan at snf.stanford.edu  Wed Mar 26 11:28:24 2003
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Mar 26, 2003 11:28:24 AM
Subject: Shutdown amtetcher 2003-03-26 10:46:48: Report Clear for amtetcher
Message-ID: <mailman.394.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

Removed arcing. 



From hphan at snf.stanford.edu  Wed Mar 26 11:29:00 2003
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Mar 26, 2003 11:29:00 AM
Subject: Shutdown amtetcher 2003-03-26 11:29:00: Report Shutdown for amtetcher
Message-ID: <mailman.395.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

System Power  Off



From hphan at snf.stanford.edu  Wed Mar 26 04:12:31 2003
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Mar 26, 2003 4:12:31 PM
Subject: Shutdown amtetcher 2003-03-26 11:29:00: Report Clear for amtetcher
Message-ID: <mailman.396.1357938218.25670.amtetcher-pcs@snf.stanford.edu>

Len Fixed the problem.



From hphan at snf.stanford.edu  Wed Mar 26 18:17:19 2003
From: hphan at snf.stanford.edu (Henry Phan)
Date: Wed, 26 Mar 2003 18:17:19 -0800
Subject: Process Number 
Message-ID: <3E825F2F.C22AF5C@snf.stanford.edu>

Dear User:
I made a little change on the process number today. We used to have
process 1, 2, 3, 24, 25, 26, and 27. Instead of 24 to 27, I use 4 to 7.
I think that's more easier for us to recognize the process. I also
change all the base pressure to .80mT so we don't have to wait for a
long time to pump down. I recommend we leave process 1, 2, 3, and 4 as a
standard process. DO NOT CHANGE THEM. Process 5 is open for users to run
the other processes ( ex. Process 6 and 7 ). Here is the procedure:

   *  Press "Process Select" button until Process 5 is selected.
   *  Push ?Mode Select? until ?Program? mode is selected.
   * ?Load Program Key?? will show up on the screen.
   * Press ?1234? to load the program key.
   * System will ask ?Program #??
   * Type in the process #5 and then press, ?YES? to confirm.
   * After confirmed, system will ask you ?Delete Program?? press ?YES?,
     system will ask you ?Copy Another Program??.
   * After press ?YES?,  enter the process number you want to copy into
     process 5 then press ?YES? to confirm.
   * System will ask you ?Copy Another Program?? for the next step.
     Press ?NO?
   * "Overetch?" Press "YES"
   * "End of program?" Press "YES"
   * Step through the selected programs parameters by pressing, ?YES? if
     the step is correct or ?NO? if the step needs to be changed.
   * If ?NO? is pressed, you may need to enter the correct parameter and
     press ?YES? to enter it.

After you finished the process, Please follow the same procedure to load
the process #5 (Process #15) back into the process #5. You are welcome
to talk to me if you still confuse. Thank you very much for your
cooperation!!!!!

--
Henry
_ _ _ _
Henry Q. Phan
Stanford Nanofabrication Facility
CIS Room 146, Mail Code 4070
Stanford, CA  94305
(650)725-3659
hphan at snf.stanford.edu

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From hphan at snf.stanford.edu  Thu Mar 27 11:38:48 2003
From: hphan at snf.stanford.edu (Henry Phan)
Date: Thu, 27 Mar 2003 11:38:48 -0800
Subject: Back up Process 
Message-ID: <3E835348.5DC447CC@snf.stanford.edu>

Dear User;
Please keep in mind that the back up processes for 1-7 are 11-17. you
can copy them back If you accidentally delete them. Please let me know
if you problem with the machine.

--
Henry
_ _ _ _
Henry Q. Phan
Stanford Nanofabrication Facility
CIS Room 146, Mail Code 4070
Stanford, CA  94305
(650)725-3659
hphan at snf.stanford.edu