Process Number
Henry Phan
hphan at snf.stanford.edu
Wed Mar 26 18:17:19 PST 2003
Dear User:
I made a little change on the process number today. We used to have
process 1, 2, 3, 24, 25, 26, and 27. Instead of 24 to 27, I use 4 to 7.
I think that's more easier for us to recognize the process. I also
change all the base pressure to .80mT so we don't have to wait for a
long time to pump down. I recommend we leave process 1, 2, 3, and 4 as a
standard process. DO NOT CHANGE THEM. Process 5 is open for users to run
the other processes ( ex. Process 6 and 7 ). Here is the procedure:
* Press "Process Select" button until Process 5 is selected.
* Push Mode Select until Program mode is selected.
* Load Program Key? will show up on the screen.
* Press 1234 to load the program key.
* System will ask Program #?
* Type in the process #5 and then press, YES to confirm.
* After confirmed, system will ask you Delete Program? press YES,
system will ask you Copy Another Program?.
* After press YES, enter the process number you want to copy into
process 5 then press YES to confirm.
* System will ask you Copy Another Program? for the next step.
Press NO
* "Overetch?" Press "YES"
* "End of program?" Press "YES"
* Step through the selected programs parameters by pressing, YES if
the step is correct or NO if the step needs to be changed.
* If NO is pressed, you may need to enter the correct parameter and
press YES to enter it.
After you finished the process, Please follow the same procedure to load
the process #5 (Process #15) back into the process #5. You are welcome
to talk to me if you still confuse. Thank you very much for your
cooperation!!!!!
--
Henry
_ _ _ _
Henry Q. Phan
Stanford Nanofabrication Facility
CIS Room 146, Mail Code 4070
Stanford, CA 94305
(650)725-3659
hphan at snf.stanford.edu
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