From ycfu at snf.stanford.edu Fri May 2 06:57:18 2003 From: ycfu at snf.stanford.edu (ycfu at snf.stanford.edu) Date: May 2, 2003 6:57:18 PM Subject: Shutdown amtetcher 2003-05-02 18:57:17: Report Shutdown for amtetcher Message-ID: Observed arcing around one of the bottom wafers. From cbaxter at snf.stanford.edu Fri May 2 07:05:17 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 2, 2003 7:05:17 PM Subject: Shutdown amtetcher 2003-05-02 18:57:17: Report Clear for amtetcher Message-ID: check for arcing, none seen on any trays From mbadi at snf.stanford.edu Mon May 5 04:58:21 2003 From: mbadi at snf.stanford.edu (mbadi at snf.stanford.edu) Date: May 5, 2003 4:58:21 PM Subject: Problem amtetcher 2003-05-05 16:58:16: Report Problem for amtetcher Message-ID: While seasoning AMT for the oxide etch program (#3), the program kept terminating b/c the set DC bias of -530V could not be reached. I monitored the bias and the closest it got was -526 V before the program stopped. It would reach this value slowly, creeping up (with some sudden steps) from approx -500V. I ended my attempts to perform an etch after three tries to season the chamber. From booth at snf.stanford.edu Tue May 6 06:54:27 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 6, 2003 6:54:27 AM Subject: Shutdown amtetcher 2003-05-06 06:54:26: Report Shutdown for amtetcher Message-ID: Shutdown - tray #6 has arced & several trays are loose. From hphan at snf.stanford.edu Tue May 6 10:24:45 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: May 6, 2003 10:24:45 AM Subject: Shutdown amtetcher 2003-05-06 06:54:26: Report Clear for amtetcher Message-ID: Removed arcing and re-assembly all trays From hphan at snf.stanford.edu Tue May 6 10:41:36 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: May 6, 2003 10:41:36 AM Subject: Problem amtetcher 2003-05-05 16:58:16: Report Clear for amtetcher Message-ID: Found trays are loose. Fixed From hphan at snf.stanford.edu Thu May 8 03:41:05 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: May 8, 2003 3:41:05 PM Subject: Shutdown amtetcher 2003-05-08 15:41:01: Report Shutdown for amtetcher Message-ID: Arcing on tray#5. From hphan at snf.stanford.edu Thu May 8 04:59:50 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: May 8, 2003 4:59:50 PM Subject: Shutdown amtetcher 2003-05-08 15:41:01: Report Clear for amtetcher Message-ID: REmoved arcing, and seasoning now. From sjain at snf.stanford.edu Sat May 10 08:52:16 2003 From: sjain at snf.stanford.edu (sjain at snf.stanford.edu) Date: May 10, 2003 8:52:16 PM Subject: Problem amtetcher 2003-05-10 20:52:16: Report Problem for amtetcher Message-ID: DC bais was running low (~515V) for program 3 From booth at snf.stanford.edu Mon May 12 07:54:57 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 12, 2003 7:54:57 AM Subject: Shutdown amtetcher 2003-05-12 07:54:56: Report Shutdown for amtetcher Message-ID: DC bias problem. From booth at snf.stanford.edu Mon May 12 09:11:11 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 12, 2003 9:11:11 AM Subject: Problem amtetcher 2003-05-10 20:52:16: Report Clear for amtetcher Message-ID: Changed this Problem to a Shutdown Report. From hphan at snf.stanford.edu Mon May 12 10:38:13 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: May 12, 2003 10:38:13 AM Subject: Shutdown amtetcher 2003-05-12 07:54:56: Report Clear for amtetcher Message-ID: Run Process #3 to bluit some polymer. DC Bias is ok now. From hphan at snf.stanford.edu Mon May 12 04:56:48 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: May 12, 2003 4:56:48 PM Subject: Shutdown amtetcher 2003-05-12 16:56:44: Report Shutdown for amtetcher Message-ID: Found tray 2 and 5 arcing and DC Bias is low. From cbaxter at snf.stanford.edu Mon May 12 10:24:55 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 12, 2003 10:24:55 PM Subject: Shutdown amtetcher 2003-05-12 16:56:44: Report Clear for amtetcher Message-ID: cleaned and changed ardel shield From mislam at snf.stanford.edu Tue May 13 07:35:50 2003 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: May 13, 2003 7:35:50 AM Subject: Shutdown amtetcher 2003-05-13 07:35:50: Turbo off Message-ID: Enable the system and proceed to vent chamber. Machine reads "Not ready, Turbo went off". Would not vent. From booth at snf.stanford.edu Tue May 13 07:49:23 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 13, 2003 7:49:23 AM Subject: Shutdown amtetcher 2003-05-13 07:35:50: Report Clear for amtetcher Message-ID: unknown reason for turbo going off. Restarted turbo & everything looks normal. From davehong at snf.stanford.edu Tue May 13 05:24:37 2003 From: davehong at snf.stanford.edu (davehong at snf.stanford.edu) Date: May 13, 2003 5:24:37 PM Subject: Problem amtetcher 2003-05-13 17:24:37: low DC bias Message-ID: not able to reach targeted DC bias level after a few tries From cbaxter at snf.stanford.edu Tue May 13 08:16:01 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 13, 2003 8:16:01 PM Subject: Problem amtetcher 2003-05-13 17:24:37: Report Clear for amtetcher Message-ID: ran recipe#3 bias voltage set 525 and actual is 523. From hphan at snf.stanford.edu Wed May 14 03:55:39 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: May 14, 2003 3:55:39 PM Subject: Shutdown amtetcher 2003-05-14 15:55:38: Report Shutdown for amtetcher Message-ID: Arcing on tray #2. From cbaxter at snf.stanford.edu Wed May 14 07:21:52 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 14, 2003 7:21:52 PM Subject: Shutdown amtetcher 2003-05-14 15:55:38: Report Clear for amtetcher Message-ID: changed 4 ardel shield on tray#2 and ran recipe#3 From ychliu at snf.stanford.edu Fri May 16 05:39:04 2003 From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu) Date: May 16, 2003 5:39:04 PM Subject: Shutdown amtetcher 2003-05-16 17:39:04: arcing spot found Message-ID: I found arcing spot on top of tray 2 together with Dave Hong after his run. From cbaxter at snf.stanford.edu Fri May 16 10:14:17 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 16, 2003 10:14:17 PM Subject: Shutdown amtetcher 2003-05-16 17:39:04: Report Clear for amtetcher Message-ID: cleaned arcing on tray#3 and ran seasoning From bob101 at snf.stanford.edu Sun May 18 10:27:58 2003 From: bob101 at snf.stanford.edu (bob101 at snf.stanford.edu) Date: May 18, 2003 10:27:58 PM Subject: Problem amtetcher 2003-05-18 22:27:57: Report Problem for amtetcher Message-ID: Tray 6 arcing From bob101 at snf.stanford.edu Sun May 18 10:33:49 2003 From: bob101 at snf.stanford.edu (bob101 at snf.stanford.edu) Date: May 18, 2003 10:33:49 PM Subject: Shutdown amtetcher 2003-05-18 22:33:47: Report Shutdown for amtetcher Message-ID: tray 6 arcing From hphan at snf.stanford.edu Mon May 19 04:47:04 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: May 19, 2003 4:47:04 PM Subject: Problem amtetcher 2003-05-18 22:27:57: Report Clear for amtetcher Message-ID: REmoved arcing From hphan at snf.stanford.edu Mon May 19 04:47:24 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: May 19, 2003 4:47:24 PM Subject: Shutdown amtetcher 2003-05-18 22:33:47: Report Clear for amtetcher Message-ID: Removed arcing. From hphan at snf.stanford.edu Mon May 19 04:48:39 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: May 19, 2003 4:48:39 PM Subject: Shutdown amtetcher 2003-05-19 16:48:38: Report Shutdown for amtetcher Message-ID: Found a over heat connector inside RF Matching Network. From cbaxter at snf.stanford.edu Mon May 19 11:28:02 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 19, 2003 11:28:02 PM Subject: Shutdown amtetcher 2003-05-19 16:48:38: Report Clear for amtetcher Message-ID: found cooling not working, fan ac plug was plugged in to cryo heat outlet and breaker was off. moved ac plug ot spare outlet. opened up rf match and cleaned oxidize inductor coil contact. tested with process #3 recipe and monitor bias voltage required rf 1278watts for -535bias after 10mins etching. Eric help me cleaned rf match. From bob101 at snf.stanford.edu Tue May 20 11:17:46 2003 From: bob101 at snf.stanford.edu (bob101 at snf.stanford.edu) Date: May 20, 2003 11:17:46 PM Subject: Problem amtetcher 2003-05-20 23:17:45: Report Problem for amtetcher Message-ID: alarming when hold in Program 2 From cbaxter at snf.stanford.edu Tue May 20 11:27:40 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: May 20, 2003 11:27:40 PM Subject: Problem amtetcher 2003-05-20 23:17:45: Report Clear for amtetcher Message-ID: alarm is normal when is on recipe#2. From chion at snf.stanford.edu Sat May 24 11:27:59 2003 From: chion at snf.stanford.edu (chion at snf.stanford.edu) Date: May 24, 2003 11:27:59 AM Subject: Shutdown amtetcher 2003-05-24 11:27:56: Report Shutdown for amtetcher Message-ID: Bell jar lift broke down. Couldn't lift up even after venting. Also, vacuum wand was found defective. From jhaydon at snf.stanford.edu Tue May 27 11:27:26 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: May 27, 2003 11:27:26 AM Subject: Shutdown amtetcher 2003-05-24 11:27:56: Report Clear for amtetcher Message-ID: lift is working may be a bad relay From jhaydon at snf.stanford.edu Tue May 27 11:27:54 2003 From: jhaydon at snf.stanford.edu (jhaydon at snf.stanford.edu) Date: May 27, 2003 11:27:54 AM Subject: Problem amtetcher 2003-05-27 11:27:53: Report Problem for amtetcher Message-ID: vacuum wand not working From booth at snf.stanford.edu Tue May 27 02:00:21 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: May 27, 2003 2:00:21 PM Subject: Problem amtetcher 2003-05-27 11:27:53: Report Clear for amtetcher Message-ID: Replaced vac wand handle assy.