Shutdown amtetcher 2003-05-19 16:48:38: Report Clear for amtetcher

cbaxter at snf.stanford.edu cbaxter at snf.stanford.edu
Mon May 19 11:28:02 PDT 2003


found cooling not working, fan ac plug was plugged in
to cryo heat outlet and breaker was off. moved ac plug
ot spare outlet. opened up rf match and cleaned 
oxidize inductor coil contact. tested with process #3 recipe
and monitor bias voltage required rf 1278watts for -535bias
after 10mins etching. Eric help me cleaned rf match.




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