From sigari at snf.stanford.edu  Tue Nov  4 09:26:37 2003
From: sigari at snf.stanford.edu (sigari at snf.stanford.edu)
Date: Tue, 4 Nov 2003 09:26:37 -0800
Subject: Shutdown amtetcher 2003-11-04 09:26:36: arching
Message-ID: <mailman.518.1357938219.25670.amtetcher-pcs@snf.stanford.edu>

Noticed arching during the process. Evidence of arching in one edge of plate2 #2 and # 5.



From hphan at snf.stanford.edu  Tue Nov  4 12:14:22 2003
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Tue, 4 Nov 2003 12:14:22 -0800
Subject: Shutdown amtetcher 2003-11-04 09:26:36: arching
Message-ID: <mailman.519.1357938219.25670.amtetcher-pcs@snf.stanford.edu>

Please enable over me if you want to use the machine after the seasoning. Please check all the trays carefully since I'am running a long process. 



From bwacker at snf.stanford.edu  Wed Nov  5 15:09:35 2003
From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu)
Date: Wed, 5 Nov 2003 15:09:35 -0800
Subject: Shutdown amtetcher 2003-11-05 15:09:34: In eqipment mode, cannot run
Message-ID: <mailman.520.1357938219.25670.amtetcher-pcs@snf.stanford.edu>




From cbaxter at snf.stanford.edu  Wed Nov  5 16:58:33 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 5 Nov 2003 16:58:33 -0800
Subject: Shutdown amtetcher 2003-11-05 15:09:34: In eqipment mode, cannot run
Message-ID: <mailman.521.1357938219.25670.amtetcher-pcs@snf.stanford.edu>

Len reboot the system and I top off heat exchanger. run 10 minsrecipe#3 seasoning



From bwacker at snf.stanford.edu  Wed Nov  5 17:47:10 2003
From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu)
Date: Wed, 5 Nov 2003 17:47:10 -0800
Subject: Shutdown amtetcher 2003-11-05 17:47:10: Low bias
Message-ID: <mailman.522.1357938219.25670.amtetcher-pcs@snf.stanford.edu>

I was seasoning the chamber. It had low bias problem two times .
Barbara



From cbaxter at snf.stanford.edu  Wed Nov  5 20:28:16 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 5 Nov 2003 20:28:16 -0800
Subject: Shutdown amtetcher 2003-11-05 17:47:10: Low bias
Message-ID: <mailman.523.1357938219.25670.amtetcher-pcs@snf.stanford.edu>

changed fixed tuning coil. run recipe#3 and bias is at
-534 at 1365watts



From hphan at snf.stanford.edu  Tue Nov 18 16:11:15 2003
From: hphan at snf.stanford.edu (hphan at snf.stanford.edu)
Date: Tue, 18 Nov 2003 16:11:15 -0800
Subject: Comment amtetcher 2003-11-18 16:11:15: Polymer Cleanup
Message-ID: <mailman.524.1357938219.25670.amtetcher-pcs@snf.stanford.edu>

I run a polymer cleanup and replaced all the dummy wafers. 



From iwjung at snf.stanford.edu  Wed Nov 26 21:14:29 2003
From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu)
Date: Wed, 26 Nov 2003 21:14:29 -0800
Subject: Shutdown amtetcher 2003-11-26 21:14:28: burnt metal on one latch 3rd column
Message-ID: <mailman.525.1357938219.25670.amtetcher-pcs@snf.stanford.edu>

this was discovered on inspection before use



From cbaxter at snf.stanford.edu  Wed Nov 26 21:34:42 2003
From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu)
Date: Wed, 26 Nov 2003 21:34:42 -0800
Subject: Shutdown amtetcher 2003-11-26 21:14:28: burnt metal on one latch 3rd column
Message-ID: <mailman.526.1357938219.25670.amtetcher-pcs@snf.stanford.edu>

cleaned arcing on tray#3 and changed 1 ardel shield