From davehong at snf.stanford.edu Fri Oct 3 03:59:45 2003 From: davehong at snf.stanford.edu (davehong at snf.stanford.edu) Date: Oct 3, 2003 3:59:45 PM Subject: Problem amtetcher 2003-10-03 15:59:45: Report Problem for amtetcher Message-ID: Arching in tray1. Tray1 is damaged. After enabling the AMT, I did a conditioning run and observed no arching from the window. But when I open the chamber, tray1 is already damaged. I suspected that the tray was damaged before the condition run (10min.) but I cannot be sure. I have shut down the etcher. From davehong at snf.stanford.edu Fri Oct 3 04:05:15 2003 From: davehong at snf.stanford.edu (davehong at snf.stanford.edu) Date: Oct 3, 2003 4:05:15 PM Subject: Shutdown amtetcher 2003-10-03 16:05:14: Report Shutdown for amtetcher Message-ID: Arching on tray1. From cbaxter at snf.stanford.edu Fri Oct 3 07:17:35 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Oct 3, 2003 7:17:35 PM Subject: Shutdown amtetcher 2003-10-03 16:05:14: Report Clear for amtetcher Message-ID: From cbaxter at snf.stanford.edu Fri Oct 3 07:18:26 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Oct 3, 2003 7:18:26 PM Subject: Problem amtetcher 2003-10-03 15:59:45: Report Clear for amtetcher Message-ID: changed two tray ardel shield and 8 ardel clips. From iwjung at snf.stanford.edu Fri Oct 10 01:40:44 2003 From: iwjung at snf.stanford.edu (iwjung at snf.stanford.edu) Date: Oct 10, 2003 1:40:44 PM Subject: Shutdown amtetcher 2003-10-10 13:40:43: Report Shutdown for amtetcher Message-ID: arch/burn on a latch From hphan at snf.stanford.edu Fri Oct 10 02:52:21 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Oct 10, 2003 2:52:21 PM Subject: Shutdown amtetcher 2003-10-10 13:40:43: Fixed and seasoning Message-ID: From mislam at snf.stanford.edu Wed Oct 15 09:03:40 2003 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Oct 15, 2003 9:03:40 AM Subject: Shutdown amtetcher 2003-10-15 09:03:39: Arcing mark tray #4 Message-ID: In was running std oxide etch recipe (prg 3). 11min into the run bias voltage dropped from -533V to -80V, very sudden and unusual drop. I stopped the run immediately, opened chamber and found arcing mark on tray #4. From hphan at snf.stanford.edu Wed Oct 15 03:59:19 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Oct 15, 2003 3:59:19 PM Subject: Shutdown amtetcher 2003-10-15 09:03:39: Fixed and run a seasoning Message-ID: From hphan at snf.stanford.edu Thu Oct 16 04:39:09 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Oct 16, 2003 4:39:09 PM Subject: Shutdown amtetcher 2003-10-16 16:39:08: Arcing on tray #6 Message-ID: From hphan at snf.stanford.edu Thu Oct 16 05:09:41 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Oct 16, 2003 5:09:41 PM Subject: Shutdown amtetcher 2003-10-16 16:39:08: Fixed and seasoning Message-ID: From mislam at snf.stanford.edu Sat Oct 18 10:41:35 2003 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Oct 18, 2003 10:41:35 AM Subject: Shutdown amtetcher 2003-10-18 10:41:32: Arcing mark tray #2 Message-ID: I was running std oxide etch recipe (prg #3). I ran three 10min cycle, checked for arcing at the end of each cycle. At the 4th cycle bias voltage jupmed to -565V, stopped run and checked chamber, tray #2 has arcing mark at the latch. From hphan at snf.stanford.edu Mon Oct 20 04:06:53 2003 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Oct 20, 2003 4:06:53 PM Subject: Shutdown amtetcher 2003-10-18 10:41:32: Fixed and seasoning now Message-ID: From ychliu at snf.stanford.edu Mon Oct 20 07:16:31 2003 From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu) Date: Oct 20, 2003 7:16:31 PM Subject: Shutdown amtetcher 2003-10-20 19:16:30: Arcing spot found on top of tray 2 Message-ID: I enabled the machine after seeing the green light in coral. Before running any process, I checked the tray and found the arcing spot. Was it fixed after last shutdown? From cbaxter at snf.stanford.edu Mon Oct 20 09:47:02 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Oct 20, 2003 9:47:02 PM Subject: Shutdown amtetcher 2003-10-20 19:16:30: Report Clear for amtetcher Message-ID: cleaned arcing on tray#2 and season chamber From sigari at snf.stanford.edu Tue Oct 21 08:25:26 2003 From: sigari at snf.stanford.edu (sigari at snf.stanford.edu) Date: Oct 21, 2003 8:25:26 AM Subject: Shutdown amtetcher 2003-10-21 08:25:25: Report Shutdown for amtetcher Message-ID: It stopped the program 2 by itself and shows the message: No hot loop flow " message. From sigari at snf.stanford.edu Tue Oct 21 08:26:43 2003 From: sigari at snf.stanford.edu (sigari at snf.stanford.edu) Date: Oct 21, 2003 8:26:43 AM Subject: Shutdown amtetcher 2003-10-21 08:26:42: Report Shutdown for amtetcher Message-ID: it stopped the program 2 byitself and gavethe message: No hot loop flow fixed" message. From booth at snf.stanford.edu Tue Oct 21 08:51:06 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 21, 2003 8:51:06 AM Subject: Shutdown amtetcher 2003-10-21 08:26:42: Report Clear for amtetcher Message-ID: System had shut off by itself. Restarted & ran Prog2 "pump&hold". From booth at snf.stanford.edu Tue Oct 21 08:51:28 2003 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Oct 21, 2003 8:51:28 AM Subject: Shutdown amtetcher 2003-10-21 08:25:25: Report Clear for amtetcher Message-ID: duplicate report From quickwin at snf.stanford.edu Fri Oct 24 19:56:19 2003 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Fri, 24 Oct 2003 19:56:19 -0700 Subject: Shutdown amtetcher 2003-10-24 19:56:18: Report Shutdown for amtetcher Message-ID: Arcing on tray #2. From cbaxter at snf.stanford.edu Fri Oct 24 20:58:18 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 24 Oct 2003 20:58:18 -0700 Subject: Shutdown amtetcher 2003-10-24 19:56:18: Report Clear for amtetcher Message-ID: cleaned up arcing on tray#2 From sigari at snf.stanford.edu Mon Oct 27 16:19:51 2003 From: sigari at snf.stanford.edu (sigari at snf.stanford.edu) Date: Mon, 27 Oct 2003 16:19:51 -0800 Subject: Shutdown amtetcher 2003-10-27 16:19:49: Report Shutdown for amtetcher Message-ID: Severe arching noticed during the etching. Stopped the etching. Checked trays. Spots from arching in top of all 6 trays.l From cbaxter at snf.stanford.edu Mon Oct 27 21:47:12 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 27 Oct 2003 21:47:12 -0800 Subject: Shutdown amtetcher 2003-10-27 16:19:49: Report Clear for amtetcher Message-ID: cleaned up arcing on trays 2,3,4 and 5 From quickwin at snf.stanford.edu Thu Oct 30 13:01:48 2003 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Thu, 30 Oct 2003 13:01:48 -0800 Subject: Shutdown amtetcher 2003-10-30 13:01:47: Report Shutdown for amtetcher Message-ID: Serious arcing noticed in tray latch 2 (and less serious arcing in tray 4). From cbaxter at snf.stanford.edu Thu Oct 30 21:36:01 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 30 Oct 2003 21:36:01 -0800 Subject: Shutdown amtetcher 2003-10-30 13:01:47: Report Shutdown for amtetcher Message-ID: cleaned up arcing on trays 2 and 4 From ychliu at snf.stanford.edu Fri Oct 31 10:36:52 2003 From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu) Date: Fri, 31 Oct 2003 10:36:52 -0800 Subject: Shutdown amtetcher 2003-10-31 10:36:50: serious arcing spot on top of tray 2 Message-ID: From cbaxter at snf.stanford.edu Fri Oct 31 12:53:43 2003 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 31 Oct 2003 12:53:43 -0800 Subject: Shutdown amtetcher 2003-10-31 10:36:50: serious arcing spot on top of tray 2 Message-ID: repaired arcing on tray#2