Problem amtetcher 2003-10-03 15:59:45: Report Problem for amtetcher

davehong at snf.stanford.edu davehong at snf.stanford.edu
Fri Oct 3 03:59:45 PDT 2003


Arching in tray1.  Tray1 is damaged.  After enabling the AMT, I did a conditioning run and observed no arching from the window.  But when I open the chamber, tray1 is already damaged.  I suspected that the tray was damaged before the condition run (10min.) but I cannot be sure.  
I have shut down the etcher.




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