Shutdown amtetcher 2003-10-15 09:03:39: Arcing mark tray #4

mislam at snf.stanford.edu mislam at snf.stanford.edu
Wed Oct 15 09:03:40 PDT 2003


In was running std oxide etch recipe (prg 3). 11min into
the run bias voltage dropped from -533V to -80V, very
sudden and unusual drop. I stopped the run immediately,
opened chamber and found arcing mark on tray #4.




More information about the amtetcher-pcs mailing list