Shutdown amtetcher 2003-10-15 09:03:39: Arcing mark tray #4

mislam at mislam at
Wed Oct 15 09:03:40 PDT 2003

In was running std oxide etch recipe (prg 3). 11min into
the run bias voltage dropped from -533V to -80V, very
sudden and unusual drop. I stopped the run immediately,
opened chamber and found arcing mark on tray #4.

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