Shutdown amtetcher 2003-10-18 10:41:32: Arcing mark tray #2

mislam at snf.stanford.edu mislam at snf.stanford.edu
Sat Oct 18 10:41:35 PDT 2003


I was running std oxide etch recipe (prg #3). I ran three 10min
cycle, checked for arcing at the end of each cycle. At the
4th cycle bias voltage jupmed to -565V, stopped run and
checked chamber, tray #2 has arcing mark at the latch.




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