Shutdown amtetcher 2003-10-20 19:16:30: Arcing spot found on top of tray 2

ychliu at snf.stanford.edu ychliu at snf.stanford.edu
Mon Oct 20 07:16:31 PDT 2003


I enabled the machine after seeing the green light in coral. Before running any process, I checked the tray and found the arcing spot. Was it fixed after last shutdown?




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