Shutdown amtetcher 2003-10-27 16:19:49: Report Shutdown for amtetcher

sigari at snf.stanford.edu sigari at snf.stanford.edu
Mon Oct 27 16:19:51 PST 2003


Severe arching noticed during the etching. Stopped the etching. Checked trays. Spots from arching in top of all 6 trays.l




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