Shutdown amtetcher 2003-09-08 11:50:35: Arcing marks on tray #5 & #2

mislam at snf.stanford.edu mislam at snf.stanford.edu
Mon Sep 8 11:50:36 PDT 2003


Was running program#3  oxide etch recipe.
15min into etch bias voltage jumped up to
-560V. Aborted run and checked trays.
Mark on tray#2 is very small, #5 is usual dark mark.
All trays were checked before I loaded wafers and
they were fine.




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