From daesung at snf.stanford.edu Sun Apr 4 03:52:41 2004 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Sun, 4 Apr 2004 03:52:41 -0700 Subject: Shutdown amtetcher 2004-04-04 03:52:41: Arching in tray 4 Message-ID: From cbaxter at snf.stanford.edu Mon Apr 5 20:35:58 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 5 Apr 2004 20:35:58 -0700 Subject: Shutdown amtetcher 2004-04-04 03:52:41: Arching in tray 4 Message-ID: cleaned arcing on tray#4 From goksen at snf.stanford.edu Tue Apr 6 10:58:33 2004 From: goksen at snf.stanford.edu (goksen at snf.stanford.edu) Date: Tue, 6 Apr 2004 10:58:33 -0700 Subject: Shutdown amtetcher 2004-04-06 10:58:32: arching Message-ID: Arching where the trays are attached to the hex. One of them turned black during seasoning. From cbaxter at snf.stanford.edu Tue Apr 6 20:19:36 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 6 Apr 2004 20:19:36 -0700 Subject: Shutdown amtetcher 2004-04-06 10:58:32: arching Message-ID: cleaned uparcing on tray#3 From mislam at snf.stanford.edu Wed Apr 7 07:42:05 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Wed, 7 Apr 2004 07:42:05 -0700 Subject: Problem amtetcher 2004-04-07 07:42:05: very slow pumping - plasma color not normal Message-ID: Could not pump down to 0.50 mTorr in over 20min. Used to be able to pump to 0.30mTorr in 5-7min. From cbaxter at snf.stanford.edu Wed Apr 7 16:09:13 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 7 Apr 2004 16:09:13 -0700 Subject: Problem amtetcher 2004-04-07 07:42:05: very slow pumping - plasma color not normal Message-ID: pumping speed is normal. From quickwin at snf.stanford.edu Wed Apr 7 19:31:03 2004 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Wed, 7 Apr 2004 19:31:03 -0700 Subject: Shutdown amtetcher 2004-04-07 19:31:02: Arcing in tray 4 Message-ID: From cbaxter at snf.stanford.edu Wed Apr 7 20:20:30 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 7 Apr 2004 20:20:30 -0700 Subject: Shutdown amtetcher 2004-04-07 19:31:02: Arcing in tray 4 Message-ID: cleaned up arcing on tray#2 and #4. From rohits at snf.stanford.edu Fri Apr 9 02:34:46 2004 From: rohits at snf.stanford.edu (rohits at snf.stanford.edu) Date: Fri, 9 Apr 2004 02:34:46 -0700 Subject: Problem amtetcher 2004-04-09 02:34:45: possible arcing mark on tray 6 etc. Message-ID: Some problems: (1) While checking the trays at the end of my main process, I saw a light brown mark on the top of tray 6. Not sure if this is due to arcing. It wasn't present before my main process. (2) While checking the trays before using the tool, I noticed that one of the dummy wafers on tray 3 had chipped near one of the clips and there were small wafer pieces on the base. I removed this wafer and replaced it with a bare-Si wafer of my own. The broken wafer is kept in the blue cassette. (3) Similar to previous reports, the pump down speed seems to be slower than usual. It takes about 20min to go down to 0.5mtorr. Also, the plasma color seemed slightly different (darker shade of yellow) than the usual for the standard oxide etch (process 3) From eenriquez at snf.stanford.edu Fri Apr 9 10:46:03 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 9 Apr 2004 10:46:03 -0700 Subject: Problem amtetcher 2004-04-09 02:34:45: possible arcing mark on tray 6 etc. Message-ID: not arcing, just a little brownish deposit on top of the tray. From quickwin at snf.stanford.edu Fri Apr 9 19:54:01 2004 From: quickwin at snf.stanford.edu (quickwin at snf.stanford.edu) Date: Fri, 9 Apr 2004 19:54:01 -0700 Subject: Shutdown amtetcher 2004-04-09 19:53:59: arcing in tray 4 Message-ID: From eenriquez at snf.stanford.edu Mon Apr 12 15:40:02 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Apr 2004 15:40:02 -0700 Subject: Shutdown amtetcher 2004-04-09 19:53:59: arcing in tray 4 Message-ID: Cleaned up arc marks From eenriquez at snf.stanford.edu Mon Apr 12 15:40:38 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 12 Apr 2004 15:40:38 -0700 Subject: Comment amtetcher 2004-03-15 16:12:02: Experiment to eliminate arcing Message-ID: Removed kapton tape. From cbaxter at snf.stanford.edu Mon Apr 19 19:34:01 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 19 Apr 2004 19:34:01 -0700 Subject: Problem amtetcher 2004-04-18 19:09:55: pump problem Message-ID: turbo pump bearing oil was low, top off with fomblin 06/6 oil. now turbo pump to base setpoint with 80sec. From cbaxter at snf.stanford.edu Mon Apr 19 19:34:12 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 19 Apr 2004 19:34:12 -0700 Subject: Problem amtetcher 2004-04-17 17:14:48: pumpdown very slow Message-ID: From cbaxter at snf.stanford.edu Mon Apr 19 19:34:25 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 19 Apr 2004 19:34:25 -0700 Subject: Problem amtetcher 2004-04-16 16:58:44: turbo Message-ID: From ychliu at snf.stanford.edu Tue Apr 20 12:54:35 2004 From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu) Date: Tue, 20 Apr 2004 12:54:35 -0700 Subject: Problem amtetcher 2004-04-20 12:54:34: pump problem still there Message-ID: It cannot pump to below 0.6mT base pressure. I had to use 0.7mT instead of 0.2mT for recipe #6. The etch rate is ~10% higher than before. Not sure about the etching profile. From bwacker at snf.stanford.edu Wed Apr 28 14:13:47 2004 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: Wed, 28 Apr 2004 14:13:47 -0700 Subject: Problem amtetcher 2004-04-28 14:13:46: Some trays begin to show sings of arcing Message-ID: From cbaxter at snf.stanford.edu Wed Apr 28 20:51:06 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 28 Apr 2004 20:51:06 -0700 Subject: Problem amtetcher 2004-04-28 14:13:46: Some trays begin to show sings of arcing Message-ID: cleaned up arcing From latta at snf.stanford.edu Thu Apr 29 11:09:03 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 29 Apr 2004 11:09:03 -0700 Subject: Comment amtetcher 2004-04-29 11:09:02: Ran clean for 60 mins Message-ID: From latta at snf.stanford.edu Thu Apr 29 11:09:52 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 29 Apr 2004 11:09:52 -0700 Subject: Problem amtetcher 2004-04-29 11:09:52: Top of tray 2 is chipped.... Message-ID: From cbaxter at snf.stanford.edu Thu Apr 29 21:39:39 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 29 Apr 2004 21:39:39 -0700 Subject: Problem amtetcher 2004-04-29 11:09:52: Top of tray 2 is chipped.... Message-ID: changed tray#2 ardel shield. From cbaxter at snf.stanford.edu Thu Apr 29 21:42:23 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 29 Apr 2004 21:42:23 -0700 Subject: Problem amtetcher 2004-04-20 12:54:34: pump problem still there Message-ID: system now pump down to .5mt with 2mins, after tighten the fitting on the ion gauge.