Problem amtetcher 2004-04-07 07:42:05: very slow pumping - plasma color not normal

mislam at snf.stanford.edu mislam at snf.stanford.edu
Wed Apr 7 07:42:05 PDT 2004


Could not pump down to 0.50 mTorr in over 20min.
Used to be able to pump to 0.30mTorr in 5-7min.




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