Problem amtetcher 2004-04-20 12:54:34: pump problem still there

ychliu at ychliu at
Tue Apr 20 12:54:35 PDT 2004

It cannot pump to below 0.6mT base pressure. I had to use 0.7mT instead of 0.2mT for recipe #6. The etch rate is ~10% higher than before. Not sure about the etching profile.

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