Problem amtetcher 2004-04-20 12:54:34: pump problem still there

ychliu at snf.stanford.edu ychliu at snf.stanford.edu
Tue Apr 20 12:54:35 PDT 2004


It cannot pump to below 0.6mT base pressure. I had to use 0.7mT instead of 0.2mT for recipe #6. The etch rate is ~10% higher than before. Not sure about the etching profile.




More information about the amtetcher-pcs mailing list