From qwang at snf.stanford.edu Mon Aug 2 16:42:03 2004 From: qwang at snf.stanford.edu (qwang at snf.stanford.edu) Date: Mon, 2 Aug 2004 16:42:03 -0700 Subject: Problem amtetcher SNF 2004-08-02 16:42:02: arc found in running program 4 Message-ID: From cbaxter at snf.stanford.edu Mon Aug 2 17:38:07 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 2 Aug 2004 17:38:07 -0700 Subject: Problem amtetcher SNF 2004-08-02 16:42:02: arc found in running program 4 Message-ID: vented and inspected all trays and no arcing found From mislam at snf.stanford.edu Tue Aug 3 11:37:31 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Tue, 3 Aug 2004 11:37:31 -0700 Subject: Shutdown amtetcher SNF 2004-08-03 11:37:30: Arc mark Tray #2 Message-ID: From eenriquez at snf.stanford.edu Tue Aug 3 12:18:09 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 3 Aug 2004 12:18:09 -0700 Subject: Shutdown amtetcher SNF 2004-08-03 11:37:30: Arc mark Tray #2 Message-ID: cleaned arc marks. Swapped tray #2 with 4. The last 5 arc incidents occured on tray #2. From daesung at snf.stanford.edu Wed Aug 4 06:16:49 2004 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Wed, 4 Aug 2004 06:16:49 -0700 Subject: Shutdown amtetcher SNF 2004-08-04 06:16:48: Arching in tray 2 Message-ID: From eenriquez at snf.stanford.edu Wed Aug 4 08:12:21 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 4 Aug 2004 08:12:21 -0700 Subject: Shutdown amtetcher SNF 2004-08-04 06:16:48: Arching in tray 2 Message-ID: Cleaned arc marks. Swapped the clamp assembly from tray#2 with #4's From goksen at snf.stanford.edu Wed Aug 4 16:03:55 2004 From: goksen at snf.stanford.edu (goksen at snf.stanford.edu) Date: Wed, 4 Aug 2004 16:03:55 -0700 Subject: Problem amtetcher SNF 2004-08-04 16:03:55: low dc voltage Message-ID: After I disabled it, it gave a low dc voltage error during etch 4 step. I silenced the alarm. From cbaxter at snf.stanford.edu Wed Aug 4 19:48:00 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Wed, 4 Aug 2004 19:48:00 -0700 Subject: Problem amtetcher SNF 2004-08-04 16:03:55: low dc voltage Message-ID: cleaned rf coil. run recipe#2 stand by mode. bias is up at -525dcv. From daesung at snf.stanford.edu Fri Aug 6 02:09:40 2004 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Fri, 6 Aug 2004 02:09:40 -0700 Subject: Shutdown amtetcher SNF 2004-08-06 02:09:40: Arching in tray 4 Message-ID: From eenriquez at snf.stanford.edu Fri Aug 6 09:14:27 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Fri, 6 Aug 2004 09:14:27 -0700 Subject: Shutdown amtetcher SNF 2004-08-06 02:09:40: Arching in tray 4 Message-ID: Cleaned arc marks. Replaced the clamp ardel. It looks like the arcing followed the clamp from tray #2. Someone also changed Program 2 recipe (standby). Reprogrammed recipe 2. From axiu at snf.stanford.edu Sun Aug 8 15:23:16 2004 From: axiu at snf.stanford.edu (axiu at snf.stanford.edu) Date: Sun, 8 Aug 2004 15:23:16 -0700 Subject: Problem amtetcher SNF 2004-08-08 15:23:16: low dc bias Message-ID: From cbaxter at snf.stanford.edu Mon Aug 9 12:32:55 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Aug 2004 12:32:55 -0700 Subject: Problem amtetcher SNF 2004-08-08 15:23:16: low dc bias Message-ID: bias power was ok and i ran recipe#3. From tejask at snf.stanford.edu Tue Aug 10 04:06:29 2004 From: tejask at snf.stanford.edu (tejask at snf.stanford.edu) Date: Tue, 10 Aug 2004 04:06:29 -0700 Subject: Comment amtetcher SNF 2004-08-10 04:06:27: Message-ID: From tejask at snf.stanford.edu Tue Aug 10 05:22:04 2004 From: tejask at snf.stanford.edu (tejask at snf.stanford.edu) Date: Tue, 10 Aug 2004 05:22:04 -0700 Subject: Problem amtetcher SNF 2004-08-10 05:22:04: Low DC bias Message-ID: Could not run process#3 due to low DC bias. From cbaxter at snf.stanford.edu Tue Aug 10 13:51:56 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 10 Aug 2004 13:51:56 -0700 Subject: Problem amtetcher SNF 2004-08-10 05:22:04: Low DC bias Message-ID: found major arcing on tray#2 and 4 causing high reflective. cleaned trays and installed new ardel shield. monitor bias at -580vdc at 1200watts. From eenriquez at snf.stanford.edu Mon Aug 16 08:40:41 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 16 Aug 2004 08:40:41 -0700 Subject: Comment amtetcher SNF 2004-08-10 04:06:27: Message-ID: From weigao at snf.stanford.edu Mon Aug 16 17:34:39 2004 From: weigao at snf.stanford.edu (weigao at snf.stanford.edu) Date: Mon, 16 Aug 2004 17:34:39 -0700 Subject: Shutdown amtetcher SNF 2004-08-16 17:34:38: arcing Message-ID: From weigao at snf.stanford.edu Mon Aug 16 17:37:11 2004 From: weigao at snf.stanford.edu (weigao at snf.stanford.edu) Date: Mon, 16 Aug 2004 17:37:11 -0700 Subject: Problem amtetcher SNF 2004-08-16 17:37:10: arcing in wafer latch Message-ID: This time arcing happened in the wafer latch instead of on the top From cbaxter at snf.stanford.edu Mon Aug 16 19:52:41 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 16 Aug 2004 19:52:41 -0700 Subject: Problem amtetcher SNF 2004-08-16 17:37:10: arcing in wafer latch Message-ID: cleaned arcing on tray#3. From cbaxter at snf.stanford.edu Mon Aug 16 19:52:48 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 16 Aug 2004 19:52:48 -0700 Subject: Shutdown amtetcher SNF 2004-08-16 17:34:38: arcing Message-ID: From yiching at snf.stanford.edu Tue Aug 17 13:53:41 2004 From: yiching at snf.stanford.edu (yiching at snf.stanford.edu) Date: Tue, 17 Aug 2004 13:53:41 -0700 Subject: Problem amtetcher SNF 2004-08-17 13:53:40: arcing Message-ID: signs of arcing on tray #4 near the top latch. From eenriquez at snf.stanford.edu Tue Aug 17 16:34:20 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Tue, 17 Aug 2004 16:34:20 -0700 Subject: Problem amtetcher SNF 2004-08-17 13:53:40: arcing Message-ID: Cleaned tray 4. Please do not change recipe #2. From rfasch at snf.stanford.edu Tue Aug 17 18:16:29 2004 From: rfasch at snf.stanford.edu (rfasch at snf.stanford.edu) Date: Tue, 17 Aug 2004 18:16:29 -0700 Subject: Shutdown amtetcher SNF 2004-08-17 18:16:28: arcing on tray 4 Message-ID: chamber is pumped down! From cbaxter at snf.stanford.edu Tue Aug 17 20:23:45 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 17 Aug 2004 20:23:45 -0700 Subject: Shutdown amtetcher SNF 2004-08-17 18:16:28: arcing on tray 4 Message-ID: cleaned arcing on tray#4. From mislam at snf.stanford.edu Thu Aug 19 09:09:39 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Thu, 19 Aug 2004 09:09:39 -0700 Subject: Shutdown amtetcher SNF 2004-08-19 09:09:39: Acring mark tray #3 Message-ID: From eenriquez at snf.stanford.edu Thu Aug 19 11:38:10 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 19 Aug 2004 11:38:10 -0700 Subject: Shutdown amtetcher SNF 2004-08-19 09:09:39: Acring mark tray #3 Message-ID: It was actually tray 4. Cleaned tray 4. Ran a 30 minute, 70 mT, 1000 Watt plasma clean. From yiching at snf.stanford.edu Thu Aug 19 16:20:06 2004 From: yiching at snf.stanford.edu (yiching at snf.stanford.edu) Date: Thu, 19 Aug 2004 16:20:06 -0700 Subject: Problem amtetcher SNF 2004-08-19 16:20:06: arcing Message-ID: on tray 4, near the top latch From cbaxter at snf.stanford.edu Thu Aug 19 17:59:14 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 19 Aug 2004 17:59:14 -0700 Subject: Problem amtetcher SNF 2004-08-19 16:20:06: arcing Message-ID: cleaned arcing on tray#4. changed latch and upper ardel shield. From mislam at snf.stanford.edu Mon Aug 30 10:46:27 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Mon, 30 Aug 2004 10:46:27 -0700 Subject: Problem amtetcher SNF 2004-08-30 10:46:26: Hexcode temp high Message-ID: Hexode temp shows 34C, set temp is 21C. Machine goes into holding at the end of pump down while running program#3 From eenriquez at snf.stanford.edu Mon Aug 30 12:10:48 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Mon, 30 Aug 2004 12:10:48 -0700 Subject: Problem amtetcher SNF 2004-08-30 10:46:26: Hexcode temp high Message-ID: added di water to the chiller