From vossough at snf.stanford.edu Thu Feb 5 00:50:04 2004 From: vossough at snf.stanford.edu (vossough at snf.stanford.edu) Date: Thu, 5 Feb 2004 00:50:04 -0800 Subject: Shutdown amtetcher 2004-02-05 00:50:03: error msg: "RF gen went off" Message-ID: Retrieved wafers and checked for arcing signs, did not see any. From latta at snf.stanford.edu Thu Feb 5 10:48:12 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Thu, 5 Feb 2004 10:48:12 -0800 Subject: Shutdown amtetcher 2004-02-05 00:50:03: error msg: "RF gen went off" Message-ID: Run prog 3 two times- RF fine. Should probably warn users to keep an eye on it.... From latta at snf.stanford.edu Fri Feb 6 10:57:31 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 6 Feb 2004 10:57:31 -0800 Subject: Shutdown amtetcher 2004-02-06 10:57:30: System turned off after error msg Message-ID: While trying to run recipe 3, we got a turbo cannot reach base pressure error message. After I pushed alarm silence, the system shutdown. All is dark...... From latta at snf.stanford.edu Fri Feb 6 13:47:42 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 6 Feb 2004 13:47:42 -0800 Subject: Shutdown amtetcher 2004-02-06 10:57:30: System turned off after error msg Message-ID: Elmer restarted. Test run of 5 mins prog 3 was fine. Seems to be ok. From rwoo at snf.stanford.edu Sat Feb 7 21:59:17 2004 From: rwoo at snf.stanford.edu (rwoo at snf.stanford.edu) Date: Sat, 7 Feb 2004 21:59:17 -0800 Subject: Shutdown amtetcher 2004-02-07 21:59:17: arcing marks on tray 6 Message-ID: marks found on tray 6 metal before seasoning From cbaxter at snf.stanford.edu Mon Feb 9 17:41:55 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Mon, 9 Feb 2004 17:41:55 -0800 Subject: Shutdown amtetcher 2004-02-07 21:59:17: arcing marks on tray 6 Message-ID: cleaned arcing on tray#4 and 5. From sanli at snf.stanford.edu Tue Feb 10 18:18:44 2004 From: sanli at snf.stanford.edu (sanli at snf.stanford.edu) Date: Tue, 10 Feb 2004 18:18:44 -0800 Subject: Shutdown amtetcher 2004-02-10 18:18:44: arcing on tray 4 Message-ID: From cbaxter at snf.stanford.edu Tue Feb 10 21:13:44 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 10 Feb 2004 21:13:44 -0800 Subject: Shutdown amtetcher 2004-02-10 18:18:44: arcing on tray 4 Message-ID: cleaned arcing on tray#4 From latta at snf.stanford.edu Fri Feb 13 14:44:58 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 13 Feb 2004 14:44:58 -0800 Subject: Comment amtetcher 2004-02-13 14:44:57: Chamber clean Message-ID: Cleaning plasma run- 60 min. From latta at snf.stanford.edu Fri Feb 13 15:34:14 2004 From: latta at snf.stanford.edu (latta at snf.stanford.edu) Date: Fri, 13 Feb 2004 15:34:14 -0800 Subject: Shutdown amtetcher 2004-02-13 15:34:13: Arcing on trays 2, 4 and 5 Message-ID: Small arcs on 4 and 5. Tray clips very hard to get to seat flush with the top of the hex..... From cbaxter at snf.stanford.edu Fri Feb 13 20:36:17 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 13 Feb 2004 20:36:17 -0800 Subject: Shutdown amtetcher 2004-02-13 15:34:13: Arcing on trays 2, 4 and 5 Message-ID: cleaned up arcing From cbaxter at snf.stanford.edu Fri Feb 13 20:36:25 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 13 Feb 2004 20:36:25 -0800 Subject: Comment amtetcher 2004-02-13 14:44:57: Chamber clean Message-ID: From ychliu at snf.stanford.edu Thu Feb 19 12:10:01 2004 From: ychliu at snf.stanford.edu (ychliu at snf.stanford.edu) Date: Thu, 19 Feb 2004 12:10:01 -0800 Subject: Shutdown amtetcher 2004-02-19 12:10:00: small arcing spot on top of tray #3 Message-ID: From eenriquez at snf.stanford.edu Thu Feb 19 12:55:18 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Thu, 19 Feb 2004 12:55:18 -0800 Subject: Shutdown amtetcher 2004-02-19 12:10:00: small arcing spot on top of tray #3 Message-ID: Cleaned arc marks and replaced ardel insulator. From mislam at snf.stanford.edu Wed Feb 25 10:41:33 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Wed, 25 Feb 2004 10:41:33 -0800 Subject: Shutdown amtetcher 2004-02-25 10:41:33: Error "Low Base PLT Tmp", won't run Message-ID: After venting champer the above error appeared. 'Run' button is not lit. Machine is left vented, could not pump down. From eenriquez at snf.stanford.edu Wed Feb 25 11:09:50 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Feb 2004 11:09:50 -0800 Subject: Shutdown amtetcher 2004-02-25 10:41:33: Error "Low Base PLT Tmp", won't run Message-ID: working on the problem From eenriquez at snf.stanford.edu Wed Feb 25 12:25:02 2004 From: eenriquez at snf.stanford.edu (eenriquez at snf.stanford.edu) Date: Wed, 25 Feb 2004 12:25:02 -0800 Subject: Comment amtetcher 2004-02-25 12:25:02: Reported Temp too low problem Message-ID: No problem found. Ran recipe 3 with no problems. Added water to the heat exchanger. From haniff at snf.stanford.edu Sat Feb 28 17:36:36 2004 From: haniff at snf.stanford.edu (haniff at snf.stanford.edu) Date: Sat, 28 Feb 2004 17:36:36 -0800 Subject: Problem amtetcher 2004-02-28 17:36:36: Message-ID: I can see a dark mark on 3 rd panel but did not see arcing during my run. From daesung at snf.stanford.edu Sun Feb 29 20:28:38 2004 From: daesung at snf.stanford.edu (daesung at snf.stanford.edu) Date: Sun, 29 Feb 2004 20:28:38 -0800 Subject: Problem amtetcher 2004-02-29 20:28:37: Arching in tray 4 Message-ID: