From hphan at snf.stanford.edu Mon Jan 5 14:04:31 2004 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Mon, 5 Jan 2004 14:04:31 -0800 Subject: Shutdown amtetcher 2003-12-17 03:37:51: Arcing in tray 2 Message-ID: From booth at snf.stanford.edu Mon Jan 5 15:14:41 2004 From: booth at snf.stanford.edu (booth at snf.stanford.edu) Date: Mon, 5 Jan 2004 15:14:41 -0800 Subject: Shutdown amtetcher 2004-01-05 15:14:40: Report Shutdown for amtetcher Message-ID: Henry saw arcing on trays during seasoning. From hphan at snf.stanford.edu Mon Jan 5 17:13:39 2004 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Mon, 5 Jan 2004 17:13:39 -0800 Subject: Shutdown amtetcher 2004-01-05 15:14:40: Report Shutdown for amtetcher Message-ID: From daneman at snf.stanford.edu Thu Jan 8 18:46:06 2004 From: daneman at snf.stanford.edu (daneman at snf.stanford.edu) Date: Thu, 8 Jan 2004 18:46:06 -0800 Subject: Problem amtetcher 2004-01-08 18:46:06: Flow5 out of spec Message-ID: Flow5 (NF3) went out of spec partway through the etch. It would not go above 30sccm (I needed 35sccm). Perhaps the bottle is running low. From cbaxter at snf.stanford.edu Thu Jan 8 22:12:45 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Thu, 8 Jan 2004 22:12:45 -0800 Subject: Problem amtetcher 2004-01-08 18:46:06: Flow5 out of spec Message-ID: From xiangli at snf.stanford.edu Fri Jan 9 08:04:07 2004 From: xiangli at snf.stanford.edu (xiangli at snf.stanford.edu) Date: Fri, 9 Jan 2004 08:04:07 -0800 Subject: Problem amtetcher 2004-01-09 08:04:06: Arcing at #4 Message-ID: From xiangli at snf.stanford.edu Fri Jan 9 08:05:32 2004 From: xiangli at snf.stanford.edu (xiangli at snf.stanford.edu) Date: Fri, 9 Jan 2004 08:05:32 -0800 Subject: Shutdown amtetcher 2004-01-09 08:05:31: Arcing Message-ID: From hphan at snf.stanford.edu Fri Jan 9 11:56:35 2004 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Fri, 9 Jan 2004 11:56:35 -0800 Subject: Shutdown amtetcher 2004-01-09 08:05:31: Arcing Message-ID: From hphan at snf.stanford.edu Fri Jan 9 11:56:51 2004 From: hphan at snf.stanford.edu (hphan at snf.stanford.edu) Date: Fri, 9 Jan 2004 11:56:51 -0800 Subject: Problem amtetcher 2004-01-09 08:04:06: Arcing at #4 Message-ID: From daneman at snf.stanford.edu Fri Jan 16 20:09:42 2004 From: daneman at snf.stanford.edu (daneman at snf.stanford.edu) Date: Fri, 16 Jan 2004 20:09:42 -0800 Subject: Shutdown amtetcher 2004-01-16 20:09:41: arcing in tray2 Message-ID: From cbaxter at snf.stanford.edu Fri Jan 16 20:33:37 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 16 Jan 2004 20:33:37 -0800 Subject: Shutdown amtetcher 2004-01-16 20:09:41: arcing in tray2 Message-ID: cleaned arcing on tray#2 and changed ardel shield From mislam at snf.stanford.edu Tue Jan 20 09:54:18 2004 From: mislam at snf.stanford.edu (mislam at snf.stanford.edu) Date: Tue, 20 Jan 2004 09:54:18 -0800 Subject: Shutdown amtetcher 2004-01-20 09:54:17: Found Arc mark, tray#3 Message-ID: While inspecting trays before start of seasoning run found tray#3 had an arcing mark. Previous user did not report this, neither was any process log sheet filled out. This would have got taken care of last night if was reported in coral with a shutdown. Trays are to be inspected for arcing before and after every run. From cbaxter at snf.stanford.edu Tue Jan 20 17:21:19 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Tue, 20 Jan 2004 17:21:19 -0800 Subject: Shutdown amtetcher 2004-01-20 09:54:17: Found Arc mark, tray#3 Message-ID: cleaned up arcing on tray#3 From bwacker at snf.stanford.edu Fri Jan 30 14:35:05 2004 From: bwacker at snf.stanford.edu (bwacker at snf.stanford.edu) Date: Fri, 30 Jan 2004 14:35:05 -0800 Subject: Shutdown amtetcher 2004-01-30 14:35:04: 4-th plate clamp is burnt Message-ID: I intened to use AMT etcher but after inspection, there was a burn mark under the clamp of the 4-th plate. Barbara From cbaxter at snf.stanford.edu Fri Jan 30 18:10:41 2004 From: cbaxter at snf.stanford.edu (cbaxter at snf.stanford.edu) Date: Fri, 30 Jan 2004 18:10:41 -0800 Subject: Shutdown amtetcher 2004-01-30 14:35:04: 4-th plate clamp is burnt Message-ID: cleaned up arcing on tray#4 and season the chamber