Problem amtetcher 2004-01-08 18:46:06: Flow5 out of spec

daneman at snf.stanford.edu daneman at snf.stanford.edu
Thu Jan 8 18:46:06 PST 2004

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Flow5 (NF3) went out of spec partway through the etch. It would not go above 30sccm (I needed 35sccm). Perhaps the bottle is running low.

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