Problem amtetcher 2004-01-08 18:46:06: Flow5 out of spec

daneman at snf.stanford.edu daneman at snf.stanford.edu
Thu Jan 8 18:46:06 PST 2004


Flow5 (NF3) went out of spec partway through the etch. It would not go above 30sccm (I needed 35sccm). Perhaps the bottle is running low.




More information about the amtetcher-pcs mailing list