Shutdown amtetcher 2004-01-30 14:35:04: 4-th plate clamp is burnt

bwacker at snf.stanford.edu bwacker at snf.stanford.edu
Fri Jan 30 14:35:05 PST 2004


I intened to use AMT etcher but after inspection, there was a burn mark under the clamp of the 4-th plate.
Barbara




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